9群（電子材料・デバイス）－1 ... - ieice-hbkb.org

1 9 1 1 2013 1/(55) 9 1 1 9 1 1 2013 2/(55) 9 - 1 - 1 1-1 [2009 11 ] 1-1-1 (1) 1 1(a) 2 L m S m2 V V + 0 C/m2 0 C/m2 0 0 = 10 12 F/m E = V/L V/m 0 = 0 E 1 1(b) 1 1 V 9 1 1 2013 3/(55) r = r 0 r Relative Dielectric Constant r r r 1 E r 1 1 Q = S S C C = r 0 S/L F Q = CV Q V 1 1 r (2) 1 1(b)

2 1 1(c) +P C/m2 P P 1 1(c) Dipole Moment m C m N 1/m3 P = Nm 9 1 1 2013 4/(55) Dielectric Polarization 1 1(a) (b) V 1 1(a) + 0 0 E V 1 1(b) + P + P E V P 0 (1 1) EPr00)1( (1 2) (1 2) P E Electronic Polarization Dipolar Polarization, Orientational Polarization Induced Dipole Moment 2 kT k T Ei Pe = Nm.

3 M = e Ei e Pa = Nm, m = a Ei a Pd = Nm, m = p Ei p = 2/3kT p P P = Pe + Pa + Pd = N ( e + a + p) Ei = N Ei (1 3) a, p = 0 (1 3) Ei (1 2) E 1 1(c) E Ei = E + E E = P/3 0 Lorentz Field (1 2), ( 1 3) 9 1 1 2013 5/(55) 0321 Nrr (1 4) - Clausius-Mosotti (1 4) (1 4) 1 2 1 3 (1 4) 0321 Ne (1 5) - Lorentz-Lorenz n n Dielectric Dispersion 1 2 3 1 = 10 30 C m (3) P E E = 0 P = 0 (1 2)

4 Ferro Dielectrics E = 0 P Ps 0 Ps 1 2 E P P = 0 E E O A B C P E P = 0 E = 0 P = Ps P = 0 Ec Coercive Electric Field 2 Tc 9 1 1 2013 6/(55) 1 4 Ps Tc (1 2) P/ E r = P/ 0 E + 1 1 2 P E (4) tan 1-1-1 (1) 1 1(c) 2 Q = CV CV 2/ 2 J V V E r 0 E2/2 1 3 C = r 0 S/L R = L/S m V/R = I I V 2/R d E2, d = 1/ 1 m 1 1/j C G = 1/R 1 3(b)

5 1 We Wloss Wloss /We G = 1/R tan = Wloss /We r r = j tan = / 1 4 Tc Ps 9 1 1 2013 7/(55) Wloss /We 1 We = 0 E 2/2 Wloss = 0 E 2/2 ( d/ ) E2/2 Energy Loss d d/ 1 5 Polyethylene tan (a) (b) 1 3 1 5 tan r r (100 Hz) tan (100 Hz) (5) Id A jd A/m2 e n 1/m3 v m/sec jd = env E v E v = s E s m2/V s n d = e n s = 1/ d n s 9 1 1 2013 8/(55)

6 N0 = e n0 = r 0 d = / d sec 1 4 1 4 MIM n0 ni 2 1 5(a) Energy Gap Eg n0 p0 Eg exp ( Eg/2kBT) Eg = eV 5 eV n0 1 5(b) n 0 > n i n i > n 0 - 9 1 1 2013 9/(55) Schottky Current Space Charge Limited Current Tunneling Current H 1 5(b) Work Function (a) V = 0 (b)

7 V = V 1 5 106 V/cm Dielectric Breakdown 1-1-2 1 1(c) m 9 1 1 2013 10/(55) 1-1-1 1 6 (a) (b) 1 6 Ps = Nms s = Ps X N/m2 Ps Ps Ps 1 6 PVDF d31 = 25 10 12 CN 1 mV 1 (*1a) PVDF 30 10 12 CN 1 (*1b) VDF/TrFE vinylidene fluoride VDF with trifluoroethylene 30 10 12 CN 1 (*2a) VDF/TeFE inylidene fluoride VDF with tetrafluoroethylene TeFE 30 10 12 CN 1 (*3a)

8 VDCN/VAC copolymer of vinylidene cyanide VDCN with vinylacetate VAC 8 10 12 CN 1 (*4a) nylon 11 4 10 12 CN 1 (*5a) PVC polyvinyl chloride 10 12 CN 1 (*6a) d36 = 10 12 CN 1 (*7a) L d36 = 10 12 CN 1 (*8a) d36 = 10 12 CN 1 (*9a) D d36 = 10 12 CN 1 (*10a) (*1a) , 2003. (*1b, 2a, 3a, 4a, 5a, 6a) , IEEE Trans. on EI, 24, 375 (see Table 1), 1989. (*7a, 8a, 9a, 10a) , , , 1987. 9 1 1 2013 11/(55) Ps Ps = dX d C/N Ps Ps = N ms + N ms 1 2 2 2 Flexo-electric Effect sm sm 1 6 1) ( ), EE Text , , , 2004.

9 2) , , , 1985. 3) , , , , , , 1973. 4) , , , 1987. 5) , (2008 ), , 2008. 9 1 1 2013 12/(55) 9 - 1 - 1 1-2 [2010 7 ] 1-2-1 C rrdSC0, (S) (d) ( ) (S) (d) ( ) 1 7 1 7 1 8 (a)( )(a) (b) 9 1 1 2013 13/(55) 1 8(a) 1 8(b)

10 1 SiO2 Si SiO2 r 20 Al2O3 HfO2 2 DRAM r 100 SrTiO3 (Ba, Sr)TiO3 1000 (Pb, La)(Zr, Ti)O3 1-2-2