Transcription of Agilent 7500cs ICP-MS 포토레지스트의 직접 분석
1 Vol 11-S July 2005 YI-AN-0507-0014EN ORS Agilent 7500cs ICP-MS . ORS B, Mg, Al, Ca, Ti, Cr, Fe, Zn polyatomic . positive (P-type) .. Na, Mg, K, Ca, Cr, Mn, Fe, Ni, Cu, Zn 10~30ppb , 10ppb . integrated circuit , . GFAAS(Graphite furnace atomic absorption spectroscopy).
2 ICP-MS . N-methyl-2-pyrrolidone(NMP), propylene glycol monomethyl ether(PGME), ethyl lactate .. PGME Agilent 7500cs ICP-MS . Instrumentation < 1> polyatomic ORS Agilent 7500cs ICP-MS . 7500cs ICP-MS organic solvent introduction kit . Kit quartz narrow-bore injection torch( id) spray chamber drain fitting . Agilent quartz concentric nebulizer uptake rate 68uL/min . quartz spray chamber 5 C . < 1> Potential Interferences on Preferred Analyte Isotopes Removal of Carbon carbon.
3 Torch T-connector . spray chamber , 20% . Agilent 7500cs ICP-MS Vol 11-S July 2005 YI-AN-0507-0014EN Removal of Spectral Interferences carbon, hydrogen, oxygen sulfonic acid . Agilent 7500cs ICP-MS ORS cell . < 2> . Oxygen 20% , torch sampling depth 8mm . Ion lens ORS blank PGME 7Li, 59Co, 89Y, 205Tl 1-ppb tuning solution.
4 Non-gas Li, Y, Tl count , hydrogen gas 59Co cps(counts per second) , 40 Ar 52 ArC signal response . helium gas 59Co 63,64 . ICP-MS ChemStation multi-tune run tuning . ICP-MS . PGME 10 .. < 2> 7500cs Operation Conditions 1:10 PGME . < 3> detection limits(DL) . 35 spike . normal plasma (1600W RF) . , B, Mg, Al, K, Ca, Ti, Cr, Fe, Zn.
5 ORS . standard 2 stability plot < 1> . 3% %RSD < 3> Three Sigma DL in Photoresist and Spike Recovery Data at Level for a full Suite of Elements < 1> Stability plot
