BROOKS SMART (DMFC) MASS FLOW METERS …

1 1 BROOKS SMART (DMFC) mass FLOWMETERS AND CONTROLLERSMODELS 5800 SERIESB rooks SMART (DMFC) mass Flow METERS and mass Flow ControllersDS-TMF-DMFC-engApril 2002(Supersedes issue date May 2001)Benefits: Compact design, provides mass flowmeasurement and control of gases from3 mln/min. full scale to more than 2500 ln/min. High accuracy, repeatability and immunity totemperature changes improve performance ofyour process. Provided with adaptive control algorithmto ensure fast response, robust and stablecontrol of gas flow applications even undervarying process conditions.

2 Long term reliability, negligible zero driftensures reliable measurement and control. Fully Customer programmable PID control,I/O s and alarms. SMART technology, available for elastomer-,metal sealed-, or ultra high purity (UHP) MassFlow METERS /Controllers. SMART technology, available with PROFIBUS-DP communnication and Analogue I/O s. SMART technology, available with selectableAnalogue I/O s and digital communication(HART based) via RS 232 or RS 485. Withdigital communications you can operateeasily with most Windows based applicationswhich support DDE.

3 Easy and cost effective installation (fit-andforget) and high operating integrity throughself-monitoring. Thousands of BROOKS SMART mass Flow Metersand Controllers have been installed andoperate successfully in a variety of industriesunder various process conditions. Designed, developed, manufactured andsupplied by the first ISO-9001 Quality CertifiedM&C company in the world: BROOKS Self diagnostics and alarm functions viahardware and/or software Up to ten (10) sets of different calibrationcurves programmable Wide flow & pressure rangeThe models are: BROOKS SMART mass Flow ProductsMass Flow mass FlowFlow RangesControllerMeterModel:ModelMin.

4 Max. ,003 30ln/min5851S5861S20 100ln/min5853S5863S100 2500ln/minPERFORMANCED igital communication, via RS485 or RS232,provides access to all of the SMART DMFC sfunctions, including: For detailed information about the BROOKS SmartMass Flow products, provided with PROFIBUS-DPcommunication, we refer to document: ProfibusInstruction Manual: 541-C-068-AAG Accurate mass Flow measurement and setpointregulation (controller only), as a percentage and inselectable engineering units Flow totalizer Temperature Operational settings Calibration (storage of up to 10 cal.)

5 Curves) PID control setting fast response traditional soft start linear ramp-up/down characteristic adaptive valve control Adaptive filtering for signal flow component Alarms Self-diagnostic EEPROM error database error analogue output error Out-of-range indications for setpoint flow valve analogue output Environmental errors no gas flow detected power supply outside spec. range ambient temp. outside spec. rangeINTRODUCTIONB rooks Instrument expands the capability andfunctionality of their successful SMART mass FlowProducts. Along with analogue and digitalcommunication interfaces, these highly accurateinstruments are also available with of these BROOKS SMART mass Flow Metersand Controllers have been installed and operatesuccessfully even under severe superior design makes these BROOKS SmartMass Flow Products virtually insensitive (fit-and-forget) to process interference s.

6 Its competitive priceand its maintenance-free design, make the BrooksSmart mass Flow Products economical where othermeasuring techniques have traditionally been SMART Flow Controllers are provided with adaptivecontrol algorithm to ensure unrivalled performanceand fast control even under varying processconditions. Unsurpassed control settling time, nodead time and other features are the enhancedspecifications, which are listed in this commitment to continuous improvement in termsof specification, safety standards and applicationflexibility, make these SMART mass Flow productsleaders throughout industry.

7 BROOKS Instrumentexcels in terms of performance, features, reliability,serviceability and overall perceived PROVEN PERFORMANCE ANDRELIABILITY Accuracy: of rate and 1% for 5853/63 above 1100 ln/min(at calibration conditions) Microprocessor-based, SMART electronics. Robust adaptive control provides rapidresponse to varying process conditions,including temperature and pressurechanges. Analogue I/O and digital communication;via RS-232 point-to-point transmission orRS-485 multi-point interconnection. PROFIBUS-DP Continuous self-diagnostics for maximumreliability.

8 CE certified. Can be certified for use in Zone 2environment according to NEN 3410 andNEN-EN 50014. More than previous generationmodels installed & operational Designed for easy installation Wide range power supply Selectable analogue setpoint input/flowrateoutput signals Totalizer function Configuration pin compatible with the BROOKS E and i series Digital communication up to 38k4 Baudtransmission speed selectable for RS 232and RS 485. 12 Mbit/sec for Profibus3 HIGH PRESSURE APPLICATIONSThe BROOKS models 5850S SMART mass FlowControllers, 5860S and 5861S SMART mass FlowMeters can be used for up to 300 bar high full scale flow limits @ 300 bar operation pressureof the model 5850S SMART mass Flow Controller arefrom 100 mln/min to 10 ln/min (Nitrogen gasequivalent).

9 These conditions are in combination with an allowablemaximum pressure difference of 100 bar across theinstrument. Other ranges and limits are available ABILITYThe BROOKS SMART mass Flow METERS and Controllersperform continuous self diagnosticroutines that immediately identify any problem in thedevice, the process or the environment. The processvariables gas flow, temperature and alsoenvironmental variables like sensor, control valve andpower supply values are continuously monitored. Analarm situation in detail can be visualised on a screen(by means of digital communication).

10 It is alwaysavailable as an open collector output SMART mass FLOW CONTROLLERSFAST RESPONSE PERFORMANCEThe curves in Figure 1 depict the output signaland actual transitional flow to steady-state when gasflow enters into a process chamber, under a stepresponse command (optimized) PID control, including fastresponse to sec. and linear ramp-up and/or ramp-down control VALVE OVERRIDEGas handling safety practices must be givenconsideration in many processes. Since s are anintegral part of many gas systems, it wasmandatory to include these practices in the BrooksSmart mass Flow Controllers design of command setpoint values thecontrol valve can be fully opened or closed via thevalve override feature by simply providing a voltagesignal through the interconnection wiring or throughdigital communication (analogue input overridesdigital).