BROOKS SMART (DMFC) MASS FLOW METERS AND …

1 1 BROOKS SMART (DMFC) mass FLOWMETERS AND CONTROLLERSMODELS 5800 SERIESB rooks SMART (DMFC) mass Flow METERS and mass Flow ControllersDS-TMF-DMFC-engApril 2002(Supersedes issue date May 2001)Benefits: Compact design, provides mass flowmeasurement and control of gases from3 mln/min. full scale to more than 2500 ln/min. High accuracy, repeatability and immunity totemperature changes improve performance ofyour process. Provided with adaptive control algorithmto ensure fast response, robust and stablecontrol of gas flow applications even undervarying process conditions. Long term reliability, negligible zero driftensures reliable measurement and control. Fully Customer programmable PID control,I/O s and alarms. SMART technology, available for elastomer-,metal sealed-, or ultra high purity (UHP) MassFlow METERS /Controllers. SMART technology, available with PROFIBUS-DP communnication and Analogue I/O s. SMART technology, available with selectableAnalogue I/O s and digital communication(HART based) via RS 232 or RS 485.

2 Withdigital communications you can operateeasily with most Windows based applicationswhich support DDE. Easy and cost effective installation (fit-andforget) and high operating integrity throughself-monitoring. Thousands of BROOKS SMART mass Flow Metersand Controllers have been installed andoperate successfully in a variety of industriesunder various process conditions. Designed, developed, manufactured andsupplied by the first ISO-9001 Quality CertifiedM&C company in the world: BROOKS Self diagnostics and alarm functions viahardware and/or software Up to ten (10) sets of different calibrationcurves programmable Wide flow & pressure rangeThe models are: BROOKS SMART mass Flow ProductsMass Flow mass FlowFlow RangesControllerMeterModel:ModelMin. Max. ,003 30ln/min5851S5861S20 100ln/min5853S5863S100 2500ln/minPERFORMANCED igital communication, via RS485 or RS232,provides access to all of the SMART DMFC sfunctions, including: For detailed information about the BROOKS SmartMass Flow products, provided with PROFIBUS-DPcommunication, we refer to document: ProfibusInstruction Manual: 541-C-068-AAG Accurate mass Flow measurement and setpointregulation ( controller only), as a percentage and inselectable engineering units Flow totalizer Temperature Operational settings Calibration (storage of up to 10 cal.)

3 Curves) PID control setting fast response traditional soft start linear ramp-up/down characteristic adaptive valve control Adaptive filtering for signal flow component Alarms Self-diagnostic EEPROM error database error analogue output error Out-of-range indications for setpoint flow valve analogue output Environmental errors no gas flow detected power supply outside spec. range ambient temp. outside spec. rangeINTRODUCTIONB rooks Instrument expands the capability andfunctionality of their successful SMART mass FlowProducts. Along with analogue and digitalcommunication interfaces, these highly accurateinstruments are also available with of these BROOKS SMART mass Flow Metersand Controllers have been installed and operatesuccessfully even under severe superior design makes these BROOKS SmartMass Flow Products virtually insensitive (fit-and-forget) to process interference s. Its competitive priceand its maintenance-free design, make the BrooksSmart mass Flow Products economical where othermeasuring techniques have traditionally been SMART Flow Controllers are provided with adaptivecontrol algorithm to ensure unrivalled performanceand fast control even under varying processconditions.

4 Unsurpassed control settling time, nodead time and other features are the enhancedspecifications, which are listed in this commitment to continuous improvement in termsof specification, safety standards and applicationflexibility, make these SMART mass Flow productsleaders throughout industry. BROOKS Instrumentexcels in terms of performance, features, reliability,serviceability and overall perceived PROVEN PERFORMANCE ANDRELIABILITY Accuracy: of rate and 1% for 5853/63 above 1100 ln/min(at calibration conditions) Microprocessor-based, SMART electronics. Robust adaptive control provides rapidresponse to varying process conditions,including temperature and pressurechanges. Analogue I/O and digital communication;via RS-232 point-to-point transmission orRS-485 multi-point interconnection. PROFIBUS-DP Continuous self-diagnostics for maximumreliability. CE certified. Can be certified for use in Zone 2environment according to NEN 3410 andNEN-EN 50014.

5 More than previous generationmodels installed & operational Designed for easy installation Wide range power supply Selectable analogue setpoint input/flowrateoutput signals Totalizer function Configuration pin compatible with the BROOKS E and i series Digital communication up to 38k4 Baudtransmission speed selectable for RS 232and RS 485. 12 Mbit/sec for Profibus3 HIGH PRESSURE APPLICATIONSThe BROOKS models 5850S SMART mass FlowControllers, 5860S and 5861S SMART mass FlowMeters can be used for up to 300 bar high full scale flow limits @ 300 bar operation pressureof the model 5850S SMART mass Flow controller arefrom 100 mln/min to 10 ln/min (Nitrogen gasequivalent).These conditions are in combination with an allowablemaximum pressure difference of 100 bar across theinstrument. Other ranges and limits are available ABILITYThe BROOKS SMART mass Flow METERS and Controllersperform continuous self diagnosticroutines that immediately identify any problem in thedevice, the process or the environment.

6 The processvariables gas flow, temperature and alsoenvironmental variables like sensor, control valve andpower supply values are continuously monitored. Analarm situation in detail can be visualised on a screen(by means of digital communication). It is alwaysavailable as an open collector output SMART mass FLOW CONTROLLERSFAST RESPONSE PERFORMANCEThe curves in Figure 1 depict the output signaland actual transitional flow to steady-state when gasflow enters into a process chamber, under a stepresponse command (optimized) PID control, including fastresponse to sec. and linear ramp-up and/or ramp-down control VALVE OVERRIDEGas handling safety practices must be givenconsideration in many processes. Since s are anintegral part of many gas systems, it wasmandatory to include these practices in the BrooksSmart mass Flow Controllers design of command setpoint values thecontrol valve can be fully opened or closed via thevalve override feature by simply providing a voltagesignal through the interconnection wiring or throughdigital communication (analogue input overridesdigital).

7 This is useful for shutdown or system SOFT STARTP rocesses requiring injection of gases can beadversely affected by excessive initial gas abrupt injection of gas can result in processdamage from explosion or initial pressure problems are virtually eliminated with the softstart soft start or linear ramp up and/or rampdown (see figure 2) can be factory selected or areavailable via the User ramping is adjustable from 200% per seconddown to per second setpoint change. To bespecified at ordering or available via the OPTIONS The BROOKS SMART mass Flow METERS andControllers (DMFC) are always available withanalogue I/O setting. The models 0152/0154 offer apower supply, read out, control independently or inblending mode and other features. (see figure 4)More details wanted? Ask for our Product DataSheet 0152/0154. Standard also suitable for digital communication(either via RS-232 or RS-485) which allows you toalso use our SMART Control, model 0160, for userinterface function and (re)configuration purposesof the SMART mass Flow Products.

8 (see figure 4)More details wanted? Ask for our Product DataSheet 0160. The SMART DDE, model 0162 is a powerfulDynamic Data Exchange software product fromBrooks Instrument. It allows you to make bi-directional links between your Windows-basedapplications and the BROOKS SMART mass FlowProducts. (see figure 3 and 5)More details wanted? Ask for our Product Datasheet 1: The Response Performance of the BROOKS SMART MassFlow ControllersFigure 2: Linear ramp-up and/or ramp-down up from 200% seconddown to per second setpoint changeCOMMANDACTUAL FLOWPERCENT OF FULL SCALE4 Figure 3 TYPICAL INSTALLATIONS FOR ANALOGUE AND RS-232 SET UPMulti-channel, system operatedconfiguration with virtually unlimitednumber of connected BROOKS SMART (DMFC) mass Flow METERS (remote) power supplyand multi-point interconnection candrive up to 32 devices per COM help of our SMART DDE,COM COM 9 are INSTALLATIONS FOR RS-485 SETUPF igure 5 FIgure 4 METERS and Controllers multi-channel,analogue I/O s operated by model0154.

9 (figure 4).The model 0154 microprocessorbased electronics, provides powersupply and analogue I/O to theDMFC addition, a number of otherfunctions are standard available whenusing digital communicationvia RS-232 point-to-point (figure 4)transmission or RS-485 multi-pointcommunication (figure 5).Any Windows basedprogram can be used tolink information via SmartDDE, model 0162bi-directionally to theBrooks SMART mass FlowProductsModel 0154 microprocessor basedpower supply and read outelectronicsPower supply and analogue I/OBrooks SMART (DMFC) MassFlow Meter and ControllerRS-232 Available option: In case(re)configuration or a User Interfacefunction is required, SMART Control, model 0160 offers all features andbenefits you needRemote powersupplyRemote or internalRS-485/RS-232converterBrooks SMART (DMFC) MassFlow Meter and Controllerprovided with digitalcommunication, RS-485multi-point interconnectionSmart DDE, model 0162offers a user friendly andpowerful Dynamic DataExchange software programbetween the BROOKS SMART (DFMC) mass Flow Productsand Windows based highlevel applications software5 TYPICAL INSTALLATION FOR PROFIBUS-DPFigure 6 The SMART mass Flow products of BROOKS offer PROFIBUS-DP digital communication (high speed) capabilitiesAND analogue I/O signals are simultanuosly available.

10 When using PROFIBUS-DP, you can connect otheractuators and sensors to the same bus. saving cost (figure 6).PERFORMANCE SPECIFICATIONSFlow Accuracy of rate and 1% for 5853/63 above1100 ln/min (at calibrationconditions)Optional * 0,5% of rate and (max 100 l/min, at calibrationconditions)Repeatability of rateRangeability50:1 (within specified accuracy)Controllability100:1 ( total operating range)StabilityLess than of rate peryearTemperatureLess than / 0C of rateshiftEffectfrom original calibration over0-70 0 CPHYSICAL SPECIFICATIONSM aterials ofWetted parts stainless steel withConstructionViton , Buna-N , PTFE/Kalrez orEPDM seals or elastomersMechanicalNPT(F), Tube compression, VCRC onnectionsand VCO Option: Flanged DIN- orANSI type available; (please referto ordering information onpage 10)Electrical15-pins D-type connectorConnections(goldplated contacts) with 3 m or6 m cable9 pins D-type connector forPROFIBUS-DPRanges and pressure ratingsBrooks SMART mass Flow ProductsMass Flow mass FlowFlow RangesPressureControllerMeterRatingModel ModelMin.