Transcription of CRITERION D500 Specifications - Horiba
1 ModelSpecificationGasFull scaleOperating inlet pressureOperating differential pressureOperating downstream pressureControl rangeFlow rate accuracy at 25 CTemperature error from 25 COffset / Span stabilityRepeatabilityValve typeSettling time for step up *1 Valve sheet leakProof pressureLeak integrityWetted materialStandard fitting *2 Operating temperatureStorage temperatureInstallation orientationInlet pressure accuracyTemperature accuracyWarming up operationControl interfacePower supplyModelSpecificationGasFull scaleOperating inlet pressureOperating differential pressureOperating downstream pressureControl rangeFlow rate accuracy at 25 C *1 Temperature error from 25 COffset / Span stabilityRepeatability *1 Valve typeSettling time for step up *2 Valve sheet leakProof pressureLeak integrityWetted materialStandard fitting *3 Operating temperatureStorage temperatureInstallation orientationInlet pressure accuracyTemperature accuracyWarming up operationControl interfacePower supplyD512MG kPa(A) - 100% for digital control2 - 100% for analog control 1% (5 - 100% ) ( - 5% )+ for analog control / C (5 - 100% ) / C ( - 5% )+ / C for analog control (5 - 100% ) ( - 5% ) kPa(A) - 100% for digital control2 - 100% for analog control 1% (10 - 100% ) ( - 10% )+ for analog control / C (10 - 100% ) / C ( - 10% )+ / C for analog control (10 - 100% ) ( - 10% ) kPa(A) - 100% for digital control2 - 100% for analog control 1% (10 - 100% ) ( - 10% )+ for analog control / C (10 - 100% ) / C ( - 10% )+ / C for analog control (10 - 100% ) ( - 10% ) kPa(A)
2 1 - 100% for digital control2 - 100% for analog control 1% (20 - 100% ) (1 - 20% )+ for analog control / C (20 - 100% ) / C (1 - 20% )+ / C for analog control (20 - 100% ) (1 - 20% )H350 - 750 kPa(A), Configurable 350 kPa(D) / year sec< % - 10 SLM50 SCCM - 5 SLM10 SCCM - 1 SLMMC onfigurable240 - 450 kPa(A), Configurable 240 kPa(D) 1% / yearNormally Close / Piezo Actuator sec< % kPa(A) 5 10-12 Pa m3/s (He)SUS-316L, Ni-Alloy1/4 inch VCR equivalent, inch IGS15 - 45 C0 - 80 CAttitude Insensitive 10 kPa ( 0 - 1000 kPa(A) ) for digital signal 17 kPa ( 0 - 700 kPa(A) ) for analog signal 1 C ( 15 - 45 C ) 30 minutesAnalog:D-Subminiature 9-pin, Digital:RS-485 F-Net Protocol+15 V 5 %, 200 mA as maximum, -15 V 5 %, 150 mA as maximum kPa(A)2 - 100% 1% (50 - 100% ) (2 - 50% )+ for analog control / C (50 - 100% ) / C (2 - 50% )+ / C for analog control (50 ~ 100% ) (2 ~ 50% ) kPa(A)5 - 100% 1% (5 - 100% )+ for analog control / C (5 - 100% )+ / C for analog control (5 ~ 100% )L110 - 350 kPa(A), Configurable 110 kPa(D) 5% / year 1 sec< 2 % - 350 kPa(A), Configurable 110 kPa(D)5 - 100% 5% / year 1 sec< 5 % - 450 kPa(A), Configurable 240 kPa(D) kPa(A)1 - 100% for digital control2 - 100% for analog control 1% (20 - 100% ) (1 - 20% )+ for analog control / C (20 - 100% ) / C (1 - 20% )+ / C for analog control 1% / year (20 - 100% ) (1 - 20% )
3 Normally Close / Piezo Actuator sec< 1 % kPa(A) 5 10-12 Pa m3/s (He)SUS-316L, Ni-Alloy1/4 inch VCR equivalent, inch IGS15 - 45 C0 - 80 CAttitude Insensitive 10 kPa ( 0 - 1000 kPa(A) ) for digital signal 17 kPa ( 0 - 700 kPa(A) ) for analog signal 1 C ( 15 - 45 C ) 30 minutesAnalog:D-Subminiature 9-pin, Digital:RS-485 F-Net Protocol+15 V 5 %, 200 mA as maximum, -15 V 5 %, 150 mA as maximumH350 - 750 kPa(A), Configurable 350 kPa(D) kPa(A) - 100% for digital control2 - 100% for analog control 1% (10 - 100% ) ( - 10% )+ for analog control / C (10 - 100% ) / C ( - 10% )+ / C for analog control / year (10 - 100% ) ( - 10% ) sec< % kPa(A) 1% (50 - 100% ) (5 - 50% )+ for analog control / C (50 - 100% ) / C (5 - 50% )+ / C for analog control (50 - 100% ) (5 - 50% ) kPa(A) 1% (5 - 100% )+ for analog control / C (5 - 100% )+ / C for analog control (5 - 100% )*1 This is settling time of flow rate output for calibration gas: N2.
4 This is in accordance with E17-1011 of the SEMI standards.*2 IGS: Integrated Gas System *3 DeviceNet communication model *4 EtherCAT communication modelDigital/Analog communication modelModelSpecificationGasFull ScaleOperating inlet pressureOperating differential pressureOperating downstream pressureControl rangeFlow rate accuracy at 25 CTemperature error from 25 COffset / Span stabilityRepeatabilityValve typeSettling time for step up *1 Valve sheet leakProof pressureLeak integrityWetted materialStandard fitting *2 Operating temperatureStorage temperatureInstallation orientationInlet pressure accuracyTemperature accuracyWarming up operationControl interfacePower supplyModelSpecificationGasFull scaleOperating inlet pressureOperating differential pressureOperating downstream pressureControl rangeFlow rate accuracy at 25 C *1 Temperature error from 25 COffset / Span stabilityRepeatability *1 Valve
5 TypeSettling time for step up *2 Valve sheet leakProof pressureLeak integrityWetted materialStandard fitting *3 Operating temperatureStorage temperatureInstallation orientationInlet pressure accuracyTemperature accuracyWarming up operationControl interfacePower supplyD514MG *3 D517MG * kPa(A) - 100% 1% (5 - 100% ) ( - 5% ) / C (5 - 100% ) / C ( - 5% ) (5 - 100% ) ( - 5% ) kPa(A) - 100% 1% (10 - 100% ) ( - 10% ) / C (10 - 100% ) / C ( - 10% ) (10 - 100% ) ( - 10% ) kPa(A) - 100% 1% (10 - 100% ) ( - 10% ) / C (10 - 100% ) / C ( - 10% ) (10 - 100% ) ( - 10% ) kPa(A)1 - 100% 1% (20 - 100% ) (1 - 20% ) / C (20 - 100% ) / C (1 - 20% ) (20 - 100% ) (1 - 20% )H350 - 750 kPa(A), Configurable 350 kPa(D) / year sec< % - 450 kPa(A), Configurable 240 kPa(D) 1% / yearNormally Close / Piezo Actuator sec< % kPa(A) 5 10-12 Pa m3/s (He)SUS-316L, Ni-Alloy1/4 inch VCR equivalent, inch IGS15 - 45 C0 - 80 CAttitude Insensitive 10 kPa ( 0 - 1000 kPa(A) ) 1 C ( 15 - 45 C ) 30 minutes DeviceNetTM Protocol *3 EtherCAT Protocol *4DC24V , Applicable for ODVA standard *3 24 VDC 4V *4 kPa(A)2 - 100% 1% (50 - 100% ) (2 - 50% ) / C (50 - 100% ) / C (2 - 50% ) (50 - 100% ) (2 - 50% ) kPa(A)5 - 100% 1% (5 - 100% ) / C (5 - 100% ) (5 - 100% )L110 ~ 350 kPa(A), Configurable 110 kPa(D) 5% / year 1 sec< 2 % *4 D527MG *5L110 - 350 kPa(A), Configurable 110 kPa(D)5 - 100% 5% / year 1 sec< 5 % - 450 kPa(A), Configurable 240 kPa(D) kPa(A)
6 1 - 100% 1% (20 - 100% ) (1 - 20% ) / C (20 - 100% ) / C (1 - 20% ) 1% / year (20 - 100% ) (1 - 20% )Normally Close / Piezo Actuator sec< 1 % kPa(A) 5 10-12 Pa m3/s (He)SUS-316L, Ni-Alloy1/4 inch VCR equivalent, inch IGS15 - 45 C0 - 80 CAttitude Insensitive 10 kPa ( 0 - 1000 kPa(A) ) 1 C ( 15 - 45 C ) 30 minutes DeviceNetTM Protocol *4 EtherCAT Protocol *5DC24V , Applicable for ODVA standard *4 24 VDC 4V *5H350 - 750 kPa(A), Configurable 350 kPa(D) kPa(A) - 100% 1% (10 - 100% ) ( - 10% ) / C (10 - 100% ) / C ( - 10% ) / year (10 - 100% ) ( - 10% ) sec< % kPa(A) 1% (50 - 100% ) (5 - 50% ) / C (50 - 100% ) / C (5 - 50% ) (50 - 100% ) (5 - 50% ) kPa(A) 1% (5 - 100% ) / C (5 - 100% ) (5 - 100% )DeviceNet communication modelEtherCAT communication modelCRITERION D500 Product Specifications *1 This is settling time of flow rate output for calibration gas: N2.
7 This is in accordance with E17-1011 of the SEMI standards.*2 IGS: Integrated Gas System*1 Flow rate accuracy and repeatability of MR/MG numbers of 14 and 15 guarantee the calibration gas: N2. *2 This is settling time of flow rate output for calibration gas: N2. This is in accordance with E17-1011 of the SEMI standards.*3 IGS: Integrated Gas System *4 DeviceNet communication model *5 EtherCAT communication model*1 Flow rate accuracy and repeatability of MR/MG numbers of 14 and 15 guarantee the calibration gas: N2. *2 This is settling time of flow rate output for calibration gas: N2. This is in accordance with E17-1011 of the SEMI standards.*3 IGS: Integrated Gas System100 SCCM - 10 SLM50 SCCM - 5 SLM10 SCCM - 1 SLM10 - 50 SLM5 - 30 SLM1 - - 50 SLM5 - 30 SLM1.
