Current Inventory of Scanning Electron Microscopes

1 Current Inventory of Scanning Electron Microscopes Zeiss (Leo) ~ JEOL ~ Hitachi ~ KLA-Tencor (AMRAY) ~ FEI (Philips). SEMs Currently Available for Demonstration Our Commitment: SEMTech Solutions is committed to providing The SUPRA is an ultra high resolution FE-SEM based you with the highest on the unique GEMINI Technology. The large specimen quality reconditioned chamber allows integration of optional detectors and SEMs at the most accessories. The unique variable pressure (VP) capability competitive price. All of of SUPRA enables examination of non-conducting our SEMs are fully specimens without time consuming preparation. refurbished to meet or exceed factory Type Resolution Sample Options specifications. Each SEM. Zeiss SUPRA 55VP. TFE nm @ 1 kV 330mm dia. EDS, EBSD, can be demonstrated in our 2 nm @ 30 kV chamber, BSE, STEM, showroom to assure you (VP) 130 mm X,Y Hot/Cold Stage, are purchasing the right UPS SEM for your application. The NEON 40 EsB combines the imaging and analytical Leasing Options: capabilities of a high resolution FE-SEM, using the proven We understand that the GEMINI lens design, with an advanced Canion FIB purchase of any piece of column.

2 In addition, this CrossBeam system has a multi- equipment can be difficult. channel gas injection system (GIS) for deposition of metal It is for this reason that we and insulating layers, and can also perform enhanced and offer a lease program. This selective etching. The EsB (integrated energy and angle is a great way to conserve your company's capital. selective BSE) detector of the NEON 40 provides ultra- high BSE imaging at very short working distances. Other Zeiss NEON 40 EsB Our Process: features include a 6-axes fully eucentric motorized stage, IR CCD camera for sample viewing, and 100mm airlock. All of our SEMs undergo a Included with this CrossBeam system is a 6 month complete series of checks. warranty and on-site installation. After an initial inspection, each machine is cleaned, Type Resolution Sample Options reconditioned as required, TFE / nm @ 1 kV 330mm dia. Canion FIB, 5 and tested. After this, we FIB chamber, channel GIS, then add additional features 102 mm X,Y 100mm Airlock as needed so that your SEM will provide years of service to you.

3 The AMRAY 1845 features a 3 axes stage motorization package (X, Y, and R). This system has been upgraded to Installation & Training WinXP for digital image capture and networking. Also, an IR Chamberview System has been added as well. We offer installation and training on all the SEMs Type Resolution Sample Options we have for sale. We TFE 4 nm @ 1 kV 3 max., IRCS, 3 axes recommend this option to nm @ 25 kV 75 mm X, motorized stage make sure the system is AMRAY 1845 50 mm Y operating to full specifications and that all users are properly trained. SEMTech Solutions, Inc. ~ 6 Executive Park Drive ~ N. Billerica, MA 01862. Tel: (978) 663-9822 ~ ~ Current Inventory of Scanning Electron Microscopes Zeiss (Leo) ~ JEOL ~ Hitachi ~ KLA-Tencor (AMRAY) ~ FEI (Philips). The ELIONIX 8900FE SEM is a unique system offering Warranty calibrated measurements in X, Y, and Z! This capability STS certifies all AMRAY. is made possible by 4 secondary Electron detectors SEMs. This includes a geometrically positioned around the primary beam and standard 3 month warranty, sample.

4 More details on this 3D SEM can be found here. as well as offering after warranty service contracts, Type Resolution Sample Options which cover the complete TFE 5 nm @ 1 kV 6 max., system (options not ELIONIX 8900FE nm @ 30 kV 50 mm X, included). STS currently 88 mm Y has over 100 SEMs under contract and maintains complete parts for the The AMRAY 3300 FE-SEM offers high resolution, high AMRAY product line. For magnification imaging. This SEM has a large chamber non-AMRAY SEMs, we and a 3 axes (X,Y, and R) motorized stage. This system guarantee performance up has been upgraded to WinXP for digital image capture and to system sign-off on-site. networking. Can't find the SEM. Type Resolution Sample Options you're looking for? AMRAY 3300 TFE 5 nm @ kV 8 max., EDS, 3 axes nm @ 20 kV 100 mm X/Y motorized stage, We are continuously WinXP upgrade purchasing high quality used SEMs. If you don't see a SEM of interest on This Hitachi S-4200 FE-SEM is in excellent condition.

5 This list, contact us to see The imaging capability is super, and the system has been what we have incoming, or refurbished with our X-Stream Imaging System, which have us search for you. allows for image capture and networking via a Windows XP platform. Looking to sell your SEM? Type Resolution Sample Options CFE 5 nm @ 1 kV 4 max., EDS, BSE, IR If you have a SEM to sell nm @ 15 kV 100 mm X, Camera, Cold that matches what we are 50 mm Y Finger, X-SIS looking for, then let's talk. Hitachi S-4200. We can arrange to pack the SEM at your site and ship The AMRAY 1910 FE features a 3 axes stage it to our warehouse on motorization package (X, Y, and R), along with a 4 load short notice. lock for fast transfer of samples. Also, this system has been upgraded to WinXP for digital image capture and networking. Type Resolution Sample Options AMRAY 1910 TFE 7 nm @ 1 kV 4 max., 4 Load-lock, 3. nm @ 30 kV 100 mm X/Y axes motorized stage SEMTech Solutions, Inc. ~ 6 Executive Park Drive ~ N.

6 Billerica, MA 01862. Tel: (978) 663-9822 ~ ~ Current Inventory of Scanning Electron Microscopes Zeiss (Leo) ~ JEOL ~ Hitachi ~ KLA-Tencor (AMRAY) ~ FEI (Philips). The Hitachi Model S-3200H Scanning Electron microscope is designed for surface observation at high resolution in the fields of medicine, biology, electronics, new materials science, and so on. This system comes with an IR Chamber Scope and will be equipped with the STS. X-Stream Imaging System. Type Resolution Sample Options Hitachi S-3200H W 3nm @ 30kV 5 max., X-SIS, IRCS. 80 mm X. 40 mm Y. The AMRAY 1830 SEM features a large specimen chamber and many accessory ports for future expansion of analytical capabilities. The system has been upgraded to WinXP for digital image capture and networking. Type Resolution Sample Options W (or 4 nm @ 30 kV 4 max., BSE, IRCS, LaB6) 100 mm X/Y Cold Trap AMRAY 1830. The AMRAY 3200 variable pressure SEM allows for uncompromised examination of conventionally unfriendly SEM samples.

7 Standard features include a Robinson BSE, large chamber size, and computer controlled SEM. package. Low vacuum specimen chamber pressure to 4. Torr, variable in 25 millitorr steps. Type Resolution Sample Options LV 6nm @ 30kV (LV) 8 max., EDS, 3 axes AMRAY 3200 W (or 4nm @ 30kV (HV) 100 mm X/Y motorized stage, LaB6) IR Camera WinXP upgrade SEMs Currently being Refurbished The JEOL JSM-6340F features an in-lens secondary Electron detector capable of offering a resolution of nm at 1kV. Also included is our X-Stream Imaging System, with WinXP for image capture and networking capability. Type Resolution Sample Options CFE nm @ 1 kV 4 max., X-SIS, 4 . nm @ 20 kV 50 mm X Airlock, Cold 70 mm Y Trap JEOL JSM-6340F. SEMTech Solutions, Inc. ~ 6 Executive Park Drive ~ N. Billerica, MA 01862. Tel: (978) 663-9822 ~ ~ Current Inventory of Scanning Electron Microscopes Zeiss (Leo) ~ JEOL ~ Hitachi ~ KLA-Tencor (AMRAY) ~ FEI (Philips). The JEOL6300F offers a resolution of nm in secondary Electron imaging (SEI) mode and nm in backscattered Electron imaging (BEI) mode at 30 kV.

8 The airlock specimen chamber allows up to a 32 mm diameter sample, and the size can also be up to 150 mm without the airlock. JEOL JSM-6300F Type Resolution Sample Options CFE nm @ 30 kV 5 max., X-SIS. 50 mm X. 70 mm Y. The AMRAY 1860 FE SEM features an 8 Auto Loadlock and Windows XP upgrade for digital image capture and networking. This system comes equipped with a 5 axes motorized stage and STS IR Chamber scope as well. Type Resolution Sample Options TFE 7 nm @ 1 kV 8 max., IRCS, WinXP. nm @ 25 kV 160 mm X upgrade, 8 . AMRAY 1860 152 mm Y Loadlock This JEOL JSM-5900LV has been modified by STS to acquire the video signal through our X-Stream Imaging System for digital image capture and networking on a WinXP platform. The system comes with an 8 chamber, 5 axis motorized stage, Oxford EDS, and an STS IR. Chamberview system. Type Resolution Sample Options JEOL JSM-5900LV LV 3nm @ 30kV (SEI) 8 max., X-SIS, EDS, IR. (W) 5nm @30kV (BEI) 125 mm X Camera, 8 . 100 mm Y Chamber The Philips XL 30 is a conventional SEM with mouse- driven operation in a Windows environment.

9 This system provides both secondary Electron and backscattered Electron imaging, along with an integrated EDAX system. The XL 30 offers a 4 axis motorized stage with full manual override. This is an excellent tool for both the experienced and first-time user. Type Resolution Sample Options Philips XL 30 W @ 30kV 6 max., EDX, BSE. 50 mm X. 50 mm Y. SEMTech Solutions, Inc. ~ 6 Executive Park Drive ~ N. Billerica, MA 01862. Tel: (978) 663-9822 ~ ~ Current Inventory of Scanning Electron Microscopes Zeiss (Leo) ~ JEOL ~ Hitachi ~ KLA-Tencor (AMRAY) ~ FEI (Philips). The LEO 435VP is a high-performance, variable pressure Scanning Electron microscope with a resolution of Its 5 axis computer controlled stage is mounted in a specimen chamber measuring 300 x 265 x 190mm. Type Resolution Sample Options LV 4nm @ 30kV (HV) 8 max., (W) 100 mm X. LEO 435VP. 125 mm Y. The JEOL JSM-840 is a multi-purpose SEM capable of acceleration voltages up to 40kV. This SEM features an Orion digital image capture system running on Win98, an EDS system making it suitable for elemental analysis, and a new NanoMaker Pattern Generator system with beam blanker for Electron beam lithography to manufacture nano-scaled patterns.

10 JEOL JSM-840 Type Resolution Sample Options W 4nm 4 max., EDS, BSE, 15mm X, Beam Blanker, 25mm Y, NM PG, Orion 31mm Z digital imaging SEMTech Solutions, Inc. ~ 6 Executive Park Drive ~ N. Billerica, MA 01862. Tel: (978) 663-9822 ~