Edwards iH Dry Pumping Systems, iH80, iH600, iH1000

1 A533-50-880 Issue DManor Royal, Crawley, West Sussex, RH10 9LW, UKTelephone: +44 (0) 1293 528844 Fax: +44 (0) 1293 533453 ManualDeclaration of Conform ityWe, BOC Edwards ,Manor Royal,Crawley,West Sussex RH10 2LW. UKdeclare under our sole responsibility that the product(s)iH Dry Pumping Systems with the following components:iH Dry Pumping Systems460V, 60H2, 3-phase200/208V, 5Ol 6 OHz, 3-phase380/415V, 50H2, 3-phase230V, 60H2, 3-phaseiHF Dry Pumping Systems460V, 60H2, 3-phase200/208V, 5Ol 60H2, 3-phase380/415V, 50H2, 3-phase230V, 60H2, 3-phaseiH80 iH600 iH't0004533-s0-908 A533-51-908 A533-52-908As33-s0-94s A533-51-945 A533-52-945As33-s0-946 A533-51-946 A533-52-946A533-50-957 A533-51-957 A533-52-957iH80F iH600F iH1000FA533-57-908 A533-58-908 A533-59-908A533-57-945 A533-58-945 4533-59-945A533-57-946 A533-58-946 A533-59-946As33-s7-9s7 A533-58-957 As33-s9-957A505-34-000A505-35-000A505-39 -000A505-40-000A505-53-000A505-56-000iH Alternative Nitrogen and Cooling-Water Connection KitsiH Interface Module Fitting KitiH Enclosure Extraction Fan (For iH80 and iH600 Systems only)iH/iL Booster Pump Pressure Control KitiH/iL Interstage Port Connection KitiH/iL Light duty Exhaust Check Valveto which this declaration relates is in conformity with the following standard(s)

2 Or other normative document(s):EN60204-1:1997EN61326:1997(l ndustrial locationClass A Emissions)ENl012-2: 1996sEMr s2-93 AEN13463-1:2001following the provisions of73t023tEEC89/336/EEC94t9tEC98t37tECEle ctrical Safety; MachinesElectrical Equipment for Measurement, Control and LaboratoryUse - EMC and vacuum pumps - Safety Requirements,Part 2: vacuum Guidelines for Semiconductor Manufacturing Electrical Equipment for Potentially Explosive Voltage Compatibility for use in Potentially Explosive Atmospheres (ATEX Directive)(Category 3GD) Intemal Atmospheres Safety "^Dr J. D. Wotson, Technicol DirectorVocuum Equipment ond Exhaust Monogement Produa and PloceThis produa hos been manufactured under o quolity system registered to tSO9001(Ilo@NNN^&% BOC EDWARDSA533-50-880 Issue DSetup PasswordiH Dry Pumping Systems - Setup PasswordThe setup password for this equipment is preset as follows:SETUP PASSWORD:202 You can remove this sheet from the instruction manual and retain it in a safe place to preventunauthorised access to the setup menus in the iH Issue A Amendment to A533-40-880 A533-50-880 A533-81-880 iH Dry vacuum Pumping system 1.)

3 Scope of Amendment This amendment corrects the information given in the iH instruction manuals listed above. 2. Correction The low warning should read and not 38 as currently stated in the following places: A533-40-880, Pages 2 17 and Tables 2 6. A533-50-880, Pages 2 18 and Tables 2 6. A533-81-880, Pages 2 14 and Tables 2 6. CONTENTSS ection and directive iH HCDP dry HCDP gas HCMB mechanical booster pump (iH600/ iH1000 only) control pump temperature control pump temperature control system (iH600/ iH1000 only) and of , warning and alarm display Disconnect box (accessory) off Photohelic switch/gauge (accessory) control pump (iH600/ iH1000 only)2-14iH Dry Pumping Systemsidcs/0200/0704 Section in contact with process gas box (accessory) and the enclosure the nitrogen and/or water connections (if required) the iH the pump oil-level(s) or replace the pump display terminal and optional accessories(if necessary) the pump display optional the iH inlet to your vacuum the iH exhaust outlet to your exhaust-extraction system to your factory extraction system (optional) the nitrogen test the additional safety equipment (optional) to your emergency stop circuit (optional)

4 Supply and RF earth (ground) the iH system for your electrical supply(if necessary) the pump(s) for your electrical supply (if necessary) the electrical supply to the iH an additional RF earth (optional) the enclosure the cooling-water the interstage purge flow rates if the iH on an iH80/ iH1000 system3-29iiiH Dry Pumping SystemsSection and switch on an iH600 the disconnect box (accessory) and electrical photohelic switch/gauge (accessory) and connections3-404 PUMP DISPLAY TERMINAL MENUS AND DISPLAY CANCEL text and variable directive the system (optional) the display the normal the display and release the nitrogen pressure and adjust if the status of the iH and alarm the HCMB pump after automatic pump shut-down(iH600/ iH1000 only) the iH system after emergency stop or automatic shut-down of iH system of the load-lock pump5-15iH Dry Pumping SystemsiiiSection box and photohelic switch/gauge (accessories) after use of tube a tube fittin a tube fittin the connections, pipelines, cables and the purge gas flow and clean the exhaust-pipe, elbow and , clean and refit the exhaust-pipe and and refit the check-valve (if fitted) the HCMB pump oil-level (iH600/ iH1000 only) the HCDP pump the HCDP pump the HCMB pump oil (iH600/ iH1000 only) the gas module flow the pump display terminal display viewing a the pump display the iH system for for free rotation of the HCDP findin and alarm message fault fault findin box and photohelic switch/gauge (accessories)

5 Findin replacement6-207 STORAGE AND Dry Pumping SystemsSection TitlePage8 SERVICE, SPARES AND Temperature Gauge Connection Pressure Control Enclosure Extraction Fan Interface and Communications Single Pumpset Monitor and iH PC Interface Alternative Connections Alternative Exhaust Nitrogen Flow Pump Display Pump Display Module Extension Pump Display Terminal Extension Disconnect Photohelic Switch/Gauge Kit8-5 RETURN OF BOC Edwards EQUIPMENTI llustrationsFigure TitlePage1-1 The iH system ( iH1000 shown, with side panels removed)1-71-2 Schematic diagram of the HCDP pump gas system1-91-3 Schematic diagram of the iH80/iH600 electrical systems1-131-4 Schematic diagram of the iH1000 electrical system1-151-5 Services and electrical connections on the rear of the iH system1-171-6 Electrical components (shown without enclosure for clarity)1-191-7 Controls and indicators on the dashboard1-201-8 Front panel of the pump display terminal1-241-9 Disconnect box general arrangement1-261-10 Label positions on HCDP and HCMB1-271-11 Label positions on iH system enclosures1-282-1 iH80 dimensions (mm)2-32-2 iH600 dimensions (mm)2-42-3 iH1000 dimensions (mm)2-52-4 Services connections dimensions (mm)2-6iH Dry Pumping SystemsvIllustrations (continued)Figure TitlePage2-5 Centres of mass dimensions (mm)

6 And mass distribution2-82-6 Typical Pumping speed and pump power curves for an iH802-92-7 Typical Pumping speed and pump power curves for an iH600 at 50Hz2-102-8 Typical Pumping speed and pump power curves for an iH600 at 60Hz2-112-9 Typical Pumping speed and pump power curves for an iH1000 at 50Hz2-122-10 Typical Pumping speed and pump power curves for an iH1000 at 60Hz2-133-1 Remove the iH system from the pallet3-53-2 Lifting-bolt positions3-63-3 Remove/refit the enclosure panels3-83-4 HCDP headplate cooling-water manifold (as supplied)3-103-5 System arrangement to reduce effective footprint (if required)3-133-6 Fit the pump display terminal3-173-7 Leak-test port positions3-193-8 Reconfigure the iH system for your electrical supply (iH80/iH600 only)3-213-9 Reconfigure the pump-motor terminal-boxes (iH80/iH600 only)3-233-10 Connect the electrical supply cable to the connector mating-half3-253-11 Disconnect box mounting height requirements3-333-12 Disconnect box electrical schematic3-343-13 Disconnect box sub-panel general arrangement3-363-14 Disconnect box cable connections3-373-15 Photohelic spoolpiece3-393-16 Photohelic gauge piping connections3-404-1 Front panel of the pump display terminal4-24-2 Menu logic4-64-3 Switch on menu4-74-4 Switch off menu4-84-5 Normal menu4-94-6 Status menu4-104-7 Control menu4-124-8 Setup menu4-134-9 Run til crash menu4-164-10 Units menu4-174-11 Normal display menu4-184-12 Service menu4-194-13 Serial menu4-214-14 Zero sensors menu4-224-15 Gas valve control menu4-234-16 Manual menu4-244-17 View Status menu4-274-18 Messages menu4-294-19 Warning and alarm messages menu4-306-1 Fit a tube fittin g6-36-2 Retighten a tube fitting6-3viiH Dry Pumping

7 SystemsIllustrations (continued)Figure TitlePage6-3 Fit insulation jackets6-76-4 Clean the exhaust check-valve6-86-5 Try to turn the HCDP pump6-186-6 System lockout/tagout procedures6-19 TablesTableTitlePage1-1 Safety sensors1-222-1 Technical data2-22-2 Full load current ratings2-152-3 Nitrogen purge flow rates: high gas configuration2-162-4 Electrics box default setpoints2-172-5 Electronics module default setpoints2-172-6 Gas module default setpoints: high gas configuration2-182-7 Test parameters2-192-8 Test results2-193-1 Installation checklist3-23-2 Checklist of components3-43-3 Pins in the iH tool interface module connector plu g3-203-4 Pins in the electrical supply connector3-274-1 Menu structure4-55-1 Configuration store nominal gas flows5-45-2 Status menu sensor reading displays5-106-1 Warning messages6-216-2 Alarm messages6-266-3 Fault messages6-286-4 Fault parameters6-296-5 Fault types6-30iH Dry Pumping SystemsviiviiiiH Dry Pumping System1 Scope and definitionsThis manual provides installation, operation and maintenance instructions for the BOCE dwards iH Dry Pumping Systems.

8 You must use the iH systems as specified in this this manual before you install and operate the iH system. Important safety informationis highlighted as WARNING and CAUTION instructions; you must obey these use of WARNINGS and CAUTIONS is defined are given where failure to observe the instruction could result ininjury or death to are given where failure to observe the instruction could result in damage to theequipment, associated equipment or this manual, page, figure and title numbers are in the form 'S-N', where 'S'specifies the section and 'N' specifies the number of the page, figure or table in the units used throughout this manual conform to the SI international system of units ofmeasurements. Also, throughout this manual, wherever nitrogen flow rates are specified, theabbreviation 'slm' is used to mean 'standard ': this is a flow of 1 an ambienttemperature of 0oC and a pressure of 1013 mbar ( x 105Pa).NOTICEThe content of this manual may change from time to time without notice.

9 BOC Edwards accepts noliability for any errors that may appear in this manual nor does it make any expressed or impliedwarranties regarding the content. So far as is reasonably practicable BOC Edwards has ensured thatits products have been designed and constructed so as to be safe and without risks when properlyinstalled and used in accordance with BOC Edwards operating instructions. BOC Edwards accepts noliability for loss of profit, loss of market or any other indirect or consequential loss warranty and limit of liability are dealt with in BOC Edwards standard terms and conditionsof sale or negotiated contract under which this document is Dry Pumping Systems1-1 The following symbols may appear on the iH system:Material Safety Data Sheets for BOC supplied chemicals can be attained by contacting: UK+44 (0) 1293 528844; France +331 (1) 47 98 24 01; Germany +49 (0) 6421 8030, or; USA(transportation emergency) +1 800-424-9300 (other inquiries) +1 800-848-9800.

10 1-2iH Dry Pumping SystemsWarning - risk of electric shockWarning - hot surfacesWarning - static sensitive devicesWarning - heavy objectWarning - moving partspresentWarning - use protectiveequipmentWarning - refer to manualPE-Protective earth (ground)RF earth (ground)Warning - risk of catastrophic failure1. 2 ATEX directive implications Thisequipmentisdesignedtomeettherequirem entsofGroupIICategory3equipmentinaccorda nce with Directive 94/9/EC of the European Parliament and the Council of 23rdMarch1994ontheapproximationofthelaws oftheMemberStatesconcerningequipmentandp rotective systems intended for use in potentially explosive atmospheres. (The ATEXD irective).The ATEX Category 3 applies in respect of potential ignition sources internal to an external potentially explosive ,althoughthepumpisdesignedtopumpflammabl ematerials and mixtures, operatin gprocedures should ensure that under all normal andreasonably predicted conditions, these materials and mixtures are not within their explosive limits.