総説 MEMS 技術

1 MEMS .. MEMS Micro electro Mechanical Systems .. MEMS 40 . MEMS 1 . 1982 MEMS .. MEMS .. MEMS Micro electro Mechanical Systems . 40 MEMS .. MEMS Kurt E.. Petersen Silicon as a Mechanical Material . [1] 1982 . MEMS .. MEMS Petersen . Petersen . MEMS . 1 38 MEMS. Si . MEMS . Bosch . DRIE Deep Reactive Ion Etching . Si [2, 3] Si . [4] .. Si .. Si . Petersen Fig. 34, 35 . P-Fig. Si .. Bosch [5] 1 (a). HF Si . 2 . H2 .. Si . 1 (b) Si 1 . H2 Si (a), (b) . (c) Bosch [5]. Si .. 1 (c) 2 [7] . JTEKT .. Si 6 [6] .. [8, 9] .. [6] [10] . P-Fig. 36 [11] SAW Surface Acoustic Wave . [12] .. Petersen . [15] . Si . 1100 C . Si . CMOS .. SIP System In Package STMicroelectronics . [16] Si 10 m [17] .. CMOS .. MEMS 1 . 2 . [10] .. Stanford . P-Fig. 37 . Si Si . P-Fig. 15 17 .. Petersen . P-Fig. 19 21 . [13] 5 mm 1 . Si . Analog Devices A4.

2 [14] 1 . fF [18] . 1975 Stanford Si . GC . 12 zF P-Fig. 26, 27 . 4. 10 TCD. Thermal Conductivity Detector . TAS Micro . Total Analysis System . GC . TCD TAS .. GC .. ISFET Ion-Sensitive Field Effect 1965 Westinghouse Resonant Transistor 3 Gate Transistor . [19] Petersen . pH/pCO2 P-Fig. 44 . ISFET [20] MOS . Au .. MOS . Q .. Si . Si MEMS . Si 1 . 1980 UC Berkeley Si . [4] . Q . [21] GHz 10000 Q .. 3 ISFET Q . [19] k2 Q k2 . k2 .. AlN . FBAR Film Bulk Acoustic Resonator 1980 . FBAR [22, 23] Agilent Technologies Avago Technologies . [24] 20 AlN .. nm .. Resonant Gate Transistor .. MEMS .. [25] . 4 Q Si . Si . [26] .. 4 Si SiTime [26]. PLL Phase Lock Loop SOI DRIE SiO2 . PLL Si .. Si CMP . CMOS .. Petersen 90 . Si . V [27] OCT Optical Coherence Tomography [28] . [29] [30] . P-Fig. 23, 24 . 5 [31] . P-Fig. 39 43.

3 Si . 1 Texas Instruments . Mirror-Matrix Array .. Petersen . 2 .. Petersen . DMD . Larry J. Hornbeck DMD . Deformable Micromirror Device DMD . [33] . 51 m 128 128 .. DMD. 1990 . 1998 . DMD . 1 .. 5 2 . DMD . DMD Digital Micromirror Device [32] TiAl [34] . MEMS [35] . IMEC SiGe . 1975 SiGe . Westinghouse Mirror-Matrix Array P-Fig. 450 C . 45 Al/SiO2 Si . 50 m CMOS MEMS . [36, 37] IMEC . 6 cm . 2 cm 1100 .. [38] 25.. Au Au . MEMS .. [39] .. MEMS .. [40] . MEMS 7 [41] . LSI . [42] . 400 C . MEMS .. 6 SiGe IMEC [38] .. MEMS .. 1 .. MEMS 1970 . P-Fig. 57 61 MEMS 10 GHz . LTCC. Low Temperature Cofired Ceramic 8 . [43] . MEMS .. LTCC . MEMS LTCC . MEMS .. 1982 Petersen . MEMS .. MEMS .. 1 .. 7 . MEMS [41] .. MEMS . 10 GHz .. ESD Electrostatic Discharge . MEMS . 40 .. [1] Kurt E. Petersen, Proc. IEEE, 50 (5), 420 457.

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