総説 MEMS 技術
MEMS（Micro Electro Mechanical Systems）技術 の源流は今から40 年以上前にあり，MEMS とい う言葉が生まれるずっと前である。ある技術を理 解するにはその歴史をたどってみるのがよいが， MEMS 分野で，まず，お勧めしたいのはKurt E.
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自動車エンジンの技術史 - mems.mech.tohoku.ac.jp
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