OM 100 High Purity Opaque Quartz Glass

1 om 100 . high Purity Opaque Quartz Glass Heraeus Quarzglas om 100 . high Purity Opaque Quartz Glass General Product Description make tight vacuum seals. Furthermore, The om 100 manufacturing process is the lower porosity volume increases OM ideally suited to produce near-net, com- om 100 was developed by Heraeus 100's resistance to HF acid attack. The plex shapes like flanges with dimensions Quarzglas through a desire for an Opaque surface will remain much smoother than up to 650 mm (OD). Thick plates and Quartz Glass with properties superior to that of standard materials even after thin discs can also be readily made. those of standard available materials. The prolonged HF exposure (see Figure 3). innovative manufacturing process results This increases the useful life of the in not only enhanced opacity but also in a quartzware.

2 Technical Data much smoother surface finish, high Purity Optical and Infrared Properties and greatly improved cosmetic appear- These very desirable attributes and capa- ance. What makes all of these very desir- om 100 is an ideal Opaque Quartz Glass bilities make om 100 the material of able attributes simultaneously possible is material with excellent light diffusion and choice for semiconductor processing the presence of extremely fine microporo- thermal shielding capabilities. Due to its technology as well as all general applica- sity uniformly distributed throughout the special material structure with well con- tions where demanding thermal require- material. trolled micropores, incident radiation is ments coincide with the need for excep- scattered in a highly efficient way.

3 Tional Purity and chemical resistance. For Porosity is what lends opacity to all fields like optics and lighting technology, Mechanical Properties Opaque Quartz Glass but the size, total om 100 also provides an opportunity for volume and distribution of it is the key to innovative problem solutions. Density - g / cm3. determining performance and appear- ance. The porosity present in standard Rel. approx. 99%. Opaque materials consists of round bub- Density (relative to transparent bles roughly 100 microns in diameter. Quartz Glass ). The om 100 manufacturing process does not produce round bubbles but Porosity < 1% Vol. Available Dimensions (the SEM picture shows rather very fine irregularly shaped micor- pores (see figure 1 and 2). closed micropores with Diameter Thickness a typical size < 10 m).

4 Even though the total volume of the poro- (up to) (up to) 4-Point 4B = N / mm2. sity is much less than in conventional materials, the micropores scatter light Plates 500 mm 60 mm Bending (ref. DIN 51110, Part 1. much more efficiently. This is partly due Strength and 3 / Test Report, to their shape but is mainly because their Flanges 650 mm 200 mm ). size is much closer to that of the light wavelength. The net result is a brilliant white, glossy appearance that is obvi- ously superior to that of standard materials. Since the total porosity volume is very low (only 1 vol. %), om 100 has physical and thermal properties much closer to those of clear fused Quartz . Flame weld- ing can be accomplished without shrink- age resulting in a well-defined and smooth transition between the joined materials.

5 When flame polished, the micropores near the surface do not swell and burst resulting in the "orange peel" texture commonly seen with standard Opaque materials. Instead, the micropores tend to close thus allowing a clear surface layer to form. Besides improving the cosmetic appearance, this enhances the ability to Chemical Properties - Typical Trace Elements (ppm by weight oxide). Elements Al Ca Cr Cu Fe K Li Mg Mn Na Ti Zr Content 15 < < < Direct Spectral Transmittance Thickness 1 mm 3 mm 4 mm (200 - 500 nm) 1-4% <1% <1%. Scanning Electron Microscope (SEM) Views Figure 1: om 100 Opaque Quartz Glass Figure 2: Typical Material Density: - g / cm3 Density: - g / cm3. Micropores: less than 10 m Bubble size: 50 - 150 m Fused Quartz matrix with nonspherical, closed micropores. The reason for Fused Quartz matrix with spherical closed bubbles formed during the melt- the Opaque appearance is the scattering of light at the micropores.

6 Ing process. The large bubbles scatter light inefficiently. Figure 3: Figure 4: Surface roughness versus etching time in 5 % HF. Comparison of the transmission of om 100 Opaque Quartz Glass with that The higher density of om 100 results in a very smooth surface finish that of a typical material for thicknesses from 1 - 10 mm. The advantage of does not roughen significantly even after long exposure. This makes om 100 material is obvious for sample thicknesses below 6 mm. om 100 a perfect material for all Opaque Quartz applications. om 100 . high Purity Opaque Quartz Glass EUROPE USA ASIA. Heraeus Quarzglas Heraeus Quartz Inc. Shin-Etsu Quartz Prod. Co., Ltd. GmbH & Co. KG 17 Madison Road Shinjuku San-Ei Bldg., 12th Floor Business Unit Basic Materials Fairfield, NJ 07004-2385 22-2, 1-Chome, Nishi Shinjuku Reinhard-Heraeus-Ring 29 Phone +1 (973) 227-6010 Shinjuku-Ku D-63801 Kleinostheim Fax +1 (973) 227-4868 Tokyo 160.

7 Phone +49 (6181) 35-7444 E-Mail Phone +81 (333) 48 19 11. om 100 / / Repro. UNICO / Druck T&D. Fax +49 (6181) 35-7210 Fax +81 (333) 48 49 19. E-Mail GBM-sales@ Heraeus Quartz Inc. E-Mail 4555 Atwater Court Buford, GA 30518. Phone +1 (678) 802-2450. Fax +1 (678) 802-2478. E-Mail Printed in Germany - Technical data and pictures given in this brochure are subject to chang