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Plasma Etching
Rochester Institute of Technology Microelectronic Engineering Plasma Etching Page 8 UNIFORMITY Example: Calculate the average etch rate, etch rate uniformity given the etch rates at center, top left, top right, bottom right, bottom left are 750, 812, 765, 743, 798 nm Answer: 773.6 nm and 4.4% Etch rate non-uniformity (%)=
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