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PROCEDURAL STANDARDS FOR CERTIFIED TESTING OF ... - …

PROCEDURAL STANDARDS FOR CERTIFIED TESTING OF CLEANROOMS 2009 THIRD EDITION National Environmental Balancing Bureau 8575 Grovemont Circle Gaithersburg, Maryland 20877 301-977-3698 301-977-9589 FAX PROCEDURAL STANDARDS FOR CERTIFIED TESTING OF CLEANROOMS Copyright nebb , 2009 FIRST EDITION OCTOBER 1988 SECOND EDITION APRIL 1996 THIRD EDITION OCTOBER 2009 This book may not be reproduced in any form without written permission of the copyright owner.

III FOREWORD The purpose of the NEBB Procedural Standards for Certified Testing of Cleanrooms is to establish a uniform and systematic set of criteria for the performance of cleanroom testing and certification. Today’s buildings provide highly controlled indoor environments.

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1 PROCEDURAL STANDARDS FOR CERTIFIED TESTING OF CLEANROOMS 2009 THIRD EDITION National Environmental Balancing Bureau 8575 Grovemont Circle Gaithersburg, Maryland 20877 301-977-3698 301-977-9589 FAX PROCEDURAL STANDARDS FOR CERTIFIED TESTING OF CLEANROOMS Copyright nebb , 2009 FIRST EDITION OCTOBER 1988 SECOND EDITION APRIL 1996 THIRD EDITION OCTOBER 2009 This book may not be reproduced in any form without written permission of the copyright owner.

2 These PROCEDURAL STANDARDS were developed using reliable engineering principles and research plus consultation with, and information obtained from, manufacturers, users, TESTING laboratories and others having specialized experience. They are subject to revision as further experience and investigation may show is necessary or desirable. Cleanroom Performance TESTING , which complies with these PROCEDURAL STANDARDS , will not necessarily be acceptable, if when examined and tested, it is found to have other features that impair the result intended by these STANDARDS .

3 The National Environmental Balancing Bureau assumes no responsibility and has no liability for the application of the principles or techniques contained in these PROCEDURAL STANDARDS . Authorities considering adoption of these PROCEDURAL STANDARDS should review all Federal, State, local and contract regulations applicable to the specific installation. II III FOREWORD The purpose of the nebb PROCEDURAL STANDARDS for CERTIFIED TESTING of Cleanrooms is to establish a uniform and systematic set of criteria for the performance of cleanroom TESTING and certification.

4 Today s buildings provide highly controlled indoor environments. This is especially true when dealing with clean environmental conditions required by today s micro-electronics, bio-medical, and other highly technical industries. These conditions could not exist without sophisticated mechanical systems created by a team of skilled professionals. A key member of this team is the nebb CERTIFIED Cleanroom Performance TESTING (CPT) Firm. This Third Edition represents a departure from past editions.

5 All of the material devoted to Cleanroom Fundamentals, contamination theory and practice, and various TESTING application data has been intentionally omitted from this edition for two reasons. First, all of this material currently exists in the nebb Cleanroom Home Study Course and secondly, that type of material is not normally presented in a published standard. This PROCEDURAL Standard presents the functional requirements of the nebb Cleanroom program and the TESTING and reporting requirements only.

6 This edition is divided into two distinct Parts: STANDARDS and Procedures. These CPT PROCEDURAL STANDARDS have been developed using language defined by Shall, Should, and May as it relates to the STANDARDS and procedures described in this manual. It is important to note these particular words throughout this manual and how they pertain to the nebb STANDARDS and procedures. These STANDARDS and procedures are intended as the minimum nebb requirements that a nebb CERTIFIED CPT Firm shall follow when performing Cleanroom TESTING and Certification procedures.

7 Contract document requirements or contractual agreements between the Owner and the nebb CERTIFIED CPT Firm may supersede the nebb requirements. These PROCEDURAL STANDARDS have been carefully compiled and reviewed by the nebb Technical Committees. Part 1 STANDARDS Part 1, STANDARDS , covers the requirements for Quality Control and Compliance, Instrumentation Requirements, and CPT Reports. Revised requirements for CPT instruments and reports are identified. The new report requirements allow the nebb CERTIFIED CPT Firm more flexibility in designing their reports by prescribing sets of information that "Shall, Should and/or May" be required to complete a CPT Report.

8 Part 2 PROCEDURES Part 2, PROCEDURES, covers measurement procedures of the various TESTING requirements for cleanroom TESTING and certification. APPENDICES The Appendices include a suggested CPT Specification, References, and Engineering Equations. This Third Edition of the CPT PROCEDURAL STANDARDS , when used by nebb CERTIFIED CPT Firms, will assure the building owner or operator that facility systems have been properly tested within design and installation limitations.

9 Andrew P. Nolfo, PE nebb Technical Director CLEANROOM COMMITTEE MEMBERS AND OTHER CONTRIBUTORS FOR CURRENT AND PREVIOUS EDITIONS Current Cleanroom Committee Past Contributors: Randall J. Silva Chairman San Jose, California Robert Cherrington West Valley City, Utah Lonnie Mosley Spring Valley, California William C. Neudorfer, Seattle, Washington Ken Goldstein Phoenix, Arizona Buff Ohnhaus Albuquerque, New Mexico Donald E. Hill Independence, Missouri Jerry Greiner Portland, Oregon Keith Reals Baltimore.

10 Maryland Patrick C. Law Altamonte Springs, Florida Al Lieberman* Fremont, California Gary Rolf Phoenix, Arizona Dan Milholland Raleigh, North Carolina Wendell Lough Hampstead, New Hampshire Robert Solana Hauppauge, New York W. David Bevirt, Tucson, Arizona Kevin McCann Ajax, Ontario, Canada Michael A. Weider Bethlehem, Pennsylvania Andrew P. Nolfo, Phoenix, Arizona Additional Contributors to the Third Edition: Mike Dolim Gaithersburg, Maryland * DECEASED IV V TABLE OF CONTENTS PAGE Foreword III nebb Cleanroom Committee IV Table of Contents V PART 1 STANDARDS SECTION 1 Definitions 1


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