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ULVAC TECHNICAL JOURNAL No.66 2007 Low-k材 …

8 1.はじめに 近年,低比誘電率をもつ層間絶縁膜の実デバイス投入 の実現に向けて企業,大学,研究機関で開発が盛んに行

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  Journal, Technical, Ulvac technical journal no, Ulvac

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