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X-ray diffraction techniques for thin films

Grazing incidence (fixed angle) 6 11 Outward of In-Plane Attachment • Scanning motion is completely perpendicular to θ/2θ scan. θ/2θ scan In-Plane measurement (2θχ/φ scan) 12 In-plane effect 1400 1200 1000 800 600 400 200 0 Intensity (cps) 20 30 40 50 60 70 80 90 2θ/ω (degree)

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  Incidence, Grazing, Grazing incidence

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