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“Making of a Chip”

Copyright 2012, Intel Corporation. All rights reserved. Intel, Intel logo and Intel Core are trademarks of Intel Corporation in the and other countries. 1 Making of a Chip Illustrations 22nm 3D/Trigate Transistors Version January 2012 Copyright 2012, Intel Corporation. All rights reserved. Intel, Intel logo and Intel Core are trademarks of Intel Corporation in the and other countries. 2 The illustrations on the following foils are low resolution images that visually support the explanations of the individual steps. For publishing purposes there are high resolution JPEG files posted to the Intel website: Optionally same resolution (uncompressed) images are available as well.

Photolithography Applying Photoresist – scale: wafer level (~300mm / 12 inch) Photolithography is the process by which a specific pattern is imprinted on the wafer. It starts with the application of a liquid known as photoresist, which is evenly poured onto the wafer while it spins. It gets its name from the fact that

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