Transcription of PROCESSING OF INTEGRATED CIRCUITS
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PROCESSING OF INTEGRATED CIRCUITS
2002 John Wiley & Sons, Inc. M. , Fundamentals of Modern Manufacturing 2/e PROCESSING OFINTEGRATED CIRCUITS Overview of IC PROCESSING (Part I) Silicon PROCESSING Lithography Layer Processes Use in IC Fabrication (Part II) Integrating the Fabrication Steps IC Packaging (Part III) Yields in IC PROCESSING 2002 John Wiley & Sons, Inc. M. , Fundamentals of Modern Manufacturing 2/e INTEGRATED circuit (IC)A collection of electronic devices such as transistors,diodes, and resistors that have beenfabricated andelectricallyintraconnectedonto a small flat chip ofsemiconductor material Silicon(Si)-most widely used semiconductormaterialfor ICs, due to its combination of propertiesand low cost Less common semiconductor materials: germanium(Ge) and galliumarsenide(GaAs) Since CIRCUITS are fabricated into one solid piece ofmaterial, the termsolid stateelectronics is used forthese devices 2002 John Wiley & Sons, Inc.
Photolithography •Uses light radiation to expose a coating of photoresist on the surface of the wafer Common light source in wafer processing is ultraviolet light, due to its short wavelength •A mask containing the required geometric pattern for each layer separates the light source from the wafer, so that only the portions of the ...
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