Transcription of MEMS Solution for Semiconductor Probing - SWTest.org
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mems Solution for Semiconductor ProbingMEMS Solution for Semiconductor ProbingSouthSouth--Western Testing Workshop PresentationWestern Testing Workshop Presentation SCS Hightech by Dr. Howard Hsu06-06-200522 Presentation OverviewMEMS Probing Technology Roadmap- Compliant Probing Structure- Tighter Control of Electrical ConnectionIntroduction- Device Geometry vs. IC Characteristics- Device Geometry vs. Pad Layout Rule and Package Technology- Classical Probing Technology is Insufficient at These Circumstances- Mechanical Probing Has Shown Productivity Degradation in Volume Production- mems VPC SolutionProbing Mechanism Comparison Classical vs.
4 Introduction Device Geometry vs. IC Characteristics KGD Wafer Level Burn In I/O pins over 1000 High speed test Burn-in and test before packagein and test before package
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