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X-ray diffraction techniques for thin films
X-ray diffraction techniques for thin films Rigaku Corporation Application Laboratory Takayuki Konya 1. Today's contents (PM). Introduction X-ray diffraction method Out-of-Plane In-Plane Pole figure Reciprocal space mapping High resolution rocking curve X-ray reflectivity 2. 1. Advantage of X-ray diffraction (XRD) method Probed depth control by incidence angle Nondestructive Measurement under atmosphere pressure 3. What can we see? (hkl). a,b,c Thickness, Density, Roughness d Phase Identification Interface, transition layer, etc ? , . Crystal structure Crystal quality, lattice parameter, etc Crystal orientation Single: orientation relation of substrate & film Poly: preferred orientation 4. 2. What XRD reveals Position and coordinate of reciprocal lattice points lattice constant crystal orientation lattice distortion K. Shape of a reciprocal lattice spread of distribution reciprocal lattice points crystal perfection degree of preferred defects orientation mosaicity 5.
1 1 RigakuCorporation Application Laboratory Takayuki Konya X-ray diffraction techniques for thin films 2 Today’s contents (PM) • Introduction • X-ray diffraction method
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