Transcription of X-ray diffraction techniques for thin films
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X-ray diffraction techniques for thin films
X-ray diffraction techniques for thin films Rigaku Corporation Application Laboratory Takayuki Konya 1. Today's contents (PM). Introduction X-ray diffraction method Out-of-Plane In-Plane Pole figure Reciprocal space mapping High resolution rocking curve X-ray reflectivity 2. 1. Advantage of X-ray diffraction (XRD) method Probed depth control by incidence angle Nondestructive Measurement under atmosphere pressure 3. What can we see? (hkl). a,b,c Thickness, Density, Roughness d Phase Identification Interface, transition layer, etc ? , . Crystal structure Crystal quality, lattice parameter, etc Crystal orientation Single: orientation relation of substrate & film Poly: preferred orientation 4.
for thin films 2 Today’s contents (PM) • Introduction • X-ray diffraction method – Out-of-Plane – In-Plane – Pole figure ... and epitaxial films are observed. – Thickness and composition ratio of epitaxial films (when the degree of relaxation is known. ) k o g k g hkl
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