6Microfluidics Theory handouts
1 EE C245 Picture credit: Sandia National Lab Fluidic Dynamics Dr. Thara Srinivasan Lecture 17 Picture credit: A. Stroock et al., Microfluidic mixing on a chip
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MEMS Fabrication I : Process Flows and Bulk …
www-bsac.eecs.berkeley.edu1 U. Srinivasan © EE C245 Dr. Thara Srinivasan Lecture 2 MEMS Fabrication I : Process Flows and Bulk Micromachining Picture credit: Alien Technology
Microfluidics: Electrokinetics and Fabrication
www-bsac.eecs.berkeley.eduFabrication Techniques for Microfluidics • Replication vs. Direct Techniques • Polymer Replication Techniques • Master Fabrication • Electroplating • Back-End Processes 38
Microfluidics for DNA Analysis
www-bsac.eecs.berkeley.eduMicrofluidics for DNA Analysis Dr. Thara Srinivasan ... Integrated Microfluidics Mathies et al., Hilton Head 2002 • Mathies group microfabricated 96-channel CE plate with integrated: • Pneumatic valves and pumps ~ PDMS • Resistive heaters and temperature sensors ~ Ti/Pt
MEMS Fabrication I : Process Flows and Bulk Micromachining
www-bsac.eecs.berkeley.edu• Remove using solvents (acetone) or O 2 plasma ... • Silicon Dioxide, Silicon Nitride • Metals • Polymers Wolf and Tauber Silicon crystal structure λ= 5.43 Å ...
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