Etch rates for micromachining processing-part II ...
WILLIAMS et al.: ETCH RATES FOR MICROMACHINING PROCESSING—PART II 765 TABLE IV ETCH RATES OF SILICON NITRIDE AND ALUMINUM OXIDE (nm/min) similar Borofloat glass) are used in anodic bonding to silicon due to the high content of mobile sodium ions and to the good match of thermal expansion rates.
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