黄光制程简介 - gdt-touch.com
曝光机的种类(Scanner ,Stepper) 工作方式区分： 1 .步进式曝光机：Stepper 主要机台：Cannon iZ01 2 .扫描式曝光机：Scanner 主要机台：Cannon ES3 ,ASML /400 ,/750, /850,/1100 工作光源区分： 1 .I-Line 曝光机：365nm (Hg-Arc) 主要机台：Cannon iZ01 ,ASML /400, 2 . DUV 曝光机：248nm ,193nm (Laser)
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