Introduction To Deep Submicron Cmos Device Technology

Introduction to Deep Submicron CMOS Device Technology ...

Introduction to Deep Submicron CMOS Device Technology & Its Impact on Circuit Design Alvin L.S. Loke, Tin Tin Wee & James R. Pfiester ... Agilent Technologies Outline • CMOS Technology Trends • MOSFET Basics • Deep Submicron FET Fabrication Sequence • Enabling Technologies • Second-Order Consequences • Dealing with Process ...

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