Subsurface Void Detection

Introduction to Deep Submicron CMOS Device Technology ...

2 – void-free deposition is critical CMP excess SiO 2 Strip Si 3N 4 polish stop etched away in subsequent ... detection CMP technology pioneered by IBM • Leveraged expertise from lens polishing. Slide 16 Loke, Wee & Pfiester ... Deeper subsurface implant • …

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