Search results with tag "Devices using optical emission spectroscopy"

Reduction of Device Damage During Dry Etching of …

Reduction of Device Damage During Dry Etching of Advanced MMIC Devices Using Optical Emission Spectroscopy D. Johnson, R. Westerman, M. DeVre, Y. Lee, J. Sasserath

  Devices, Using, Optical, Reduction, During, Emissions, Damage, Spectroscopy, Etching, Devices using optical emission spectroscopy, Reduction of device damage during dry etching