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30 消除廢熱的好幫手 熱電致冷元 - ndl.org.tw
科普講堂 3 30 十九世紀時被發現熱電效應 ( Thermoelectric Effect) ，即是材料在無承受任何外 下，將熱能與電能 互相轉換，主要可以應用在發電和冷卻方面。
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ULSI - ndl.org.tw
www.ndl.org.tw濕式清潔法概要: 最常使用之晶圓表面清潔步驟為濕式化學法(wet chemistry)，在1980 年代亦曾有以乾式清潔 法取代濕式清潔法之論點，同時亦有一些相關的嘗試性研究，然而時至今日仍未有完整之乾式
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