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90 nm CMOS Cu配線技術 - fujitsu.com

90 nm CMOS Cu配線技術 FUJITSU.55, 3, (05,2004) 201 低減のために層間絶縁膜に低誘電率の絶縁膜( (1)絶縁膜の成膜(2)Via/配線パターン

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