Clean Regulator - SMC ETech

1 SRH SeriesClean RegulatorContamination controlled stainless steel regulator855 ARJAR425to 935 ARXAMRARMARPIR -AIRIRVVEXSRHSRPSRFITVICITVXITVHPVQVY1 VBAVBATAP100 SRHSRHP2P12121 Outstanding corrosion resistanceAll metal parts in contact with fluid use stainless steel 316 Oil freeParts assembled without any use of oilsConsistent Clean room productionWashed, assembled and inspected in a Class 100 environment, and sealed in double bagsGrade AGrade BManufacturing processStep response comparisonCircuit diagramContamination controlled stainless steel regulatorClean RegulatorSRH SeriesTimePressureTimeClean boothClass 100P1P2 PressureP1P22 types of diaphragm material availableDesigned to minimize residual fluidPulsation suppressingdesignDepending upon the application, PTFE (Grade A) or fluororubber (Grade B) can be selected for the diaphragm material Design includes an intake/exhaust port in the diaphragm compartment which facilitates flow Valve springs are partitioned by the diaphragmSRH Current regulatorParts assemblyDegrease/WashPure water (16M -cm)

2 WashAssemblyInspectionInterior purgePackageParts assemblyDegrease/WashAssemblyInspectionI nterior purgePackage85602 SRH3000 Note) The pressure gauge is optional. Refer to option specifications on page that the products used for the port size A2 or A3 are not available at to OrderRefer to pages 864 to 866 for sealsWith relief port fittings (Applicable tube : 4)Machined relief port M5 threadKnob operation product with reduced torqueAluminum bodyPort sizeSymbol01020304A2A3 Piping port sizeRc 1/8Rc 1/4Rc 3/8Rc 1/2 With metal gasket seal fittingWith metal gasket seal fittingSRH3000 URJF 1/4 SRH4000 URJF 3/8 SpecificationsModelRelief mechanismProof pressureMax. operating pressureFluid-contact material (metal)WeightGrade AGrade BPort sizeLow pressure typeHigh pressure typeSetpressureAmbient and fluid temperaturesGrade AGrade BDiaphragmmaterialFluidSRH4 MPa1 to to MPaStainless steel 316 (Body is stainless steel 316L)PTFEF luororubberClean air, N2, Ar, CO2, Pure waterAir, N2, Ar, CO2, WaterClean air, N2 Air, N2 Non-reliefRelief360 g730 g360 g730 g0 to 60 C (No freezing)Rc 1/8, 1/4 URJF 1/4Rc 1/4, 3/8, 1/2 URJF 3/8Rc 1/8, 1/4Rc 1/4, 3/8, 1/2 SRH3 0 SRH4 0 SRH3 1 Clean RegulatorSRH SeriesHow to to to MPaBody size341/43/8 Washing grade01 Grade AGrade BSet pressureRelief mechanism01 Non-reliefReliefGauge portorientationNil: StandardR.

3 R Specification There is only one gauge portGauge port857 ARJAR425to 935 ARXAMRARMARPIR -AIRIRVVEXSRHSRPSRFITVICITVXITVHPVQVY1 VBAVBATAP100 SRHSRH SeriesFlow Rate Characteristics (Representative Value)Fluid: AirConditions/ Inlet pressure: MPaSRH3000-02 SRH3100-02 SRH4000-03 SRH4100-03 Conditions/ Inlet pressure: MPaSRH3010-02 SRH3110-02 SRH4010-03 Conditions/ Inlet pressure: MPaSRH3000-02 SRH3100-02 SRH4000-03 Fluid: rate L/min (ANR) pressure MPaOutlet pressure MPaOutlet pressure MPaOutlet pressure MPaOutlet pressure pressure MPaOutlet pressure MPaOutlet pressure MPaOutlet pressure MPaOutlet pressure MPaOutlet pressure MPaOutlet pressure MPaFlow rate L/min (ANR)Flow rate L/min (ANR)Flow rate L/min (ANR)Flow rate L/min (ANR)Flow rate L/min (ANR)Flow rate L/min (ANR)Flow rate L/min (ANR)Flow rate L/minFlow rate L/minFlow rate L/minFlow rate L/min858 Clean Regulator SRH SeriesFluid: Water/AirSRH3010-02 SRH3110-02 SRH4010-03 SRH4110-03 Conditions/ Inlet pressure: MPa, Outlet pressure: MPa, Flow rate 2 L/minSRH3000 SRH4000 SRH3100 SRH4100 Pressure Characteristics (Representative Value)Conditions/ Inlet pressure.

4 Pressure MPaInlet pressure MPaInlet pressure pressure MPaOutlet pressure MPaOutlet pressure MPaOutlet pressure MPaOutlet pressure MPaOutlet pressure MPaOutlet pressure MPaOutlet pressure MPa00 Inlet pressure MPaFlow rate L/minFlow rate L/minFlow rate L/minFlow rate L/min859 ARJAR425to 935 ARXAMRARMARPIR -AIRIRVVEXSRHSRPSRFITVICITVXITVHPVQVY1 VBAVBATAP100 SRHSRH guideBonnetDescriptionGrade APTFEPTFEF luororubberFluororubberGrade BStainless steel 316 LPPSPPSC omponent parts 86024( )OUTIN22(27)242240 (52)40 (58)42(48)OUT84 (106)Panel thickness Max. 3 ( )IN(27)( )Max. (Max. )9/16-18 UNF: URJF1/4(7/8-14 UNF: URJF3/8)9/16-18 UNF: URJF1/4 Gauge port (standard specifications) Dimensions inside ( ) are for Regulator SRH SeriesDimensionsRc thread typeMetal gasket seal fitting typeMax.

5 (Max. )Rc 1/4 Gauge port (standard specifications)Panel mounting holesDimensions inside ( ) are for 935 ARXAMRARMARPIR 1412 42R1/4 SRH SeriesOptionsDimensionsPressure GaugeModelPort sizeOperating temperature rangeAccuracyScale rangeParts washing (fluid-contact parts)Assembly and adjustment environmentOil free / Water freeMaterialsWeightR 1/40 to 60 C (No freezing) 3% Non-lube / Non-wetStainless steel 316 Stainless steel 304 (Black melamine coating)Polycarbonateca (Hard coated) Part No. G46-00-00-2 Brass80 gItemFluid-contact partsCaseClear coverInternal partsSpecificationsGeneral degreasePrecision washGeneral production lineClean roomModelG46-2-02-SRAG46-2-02-SRBG46-4-0 2-SRAG46-4-02-SRBG46-7-02-SRAG46-7-02-SR BG46-10-02-SRAG46-10-02-SRBMPaModelsPres sure range0 to to to to unitsMPaG46- -02-SRBG46- -02-SRANote) Consult SMC for the supply of types with metal gasket counterclockwiseuntil the cover indicatorPullProcedure for setting the limit gauge indicator1) Before setting the limit indicator, turn the cover counterclockwise (approximately 6 to 7 mm) until it stops.

6 Then, remove by pulling it towards ) Use a flat head screwdriver (with a mm blade width) to set the limit careful not to bend other needle or damage the dial ) After completing the setting, replace the the cover by aligning the cutout in the cover to the groove on the top of the black case. Turn the cover clockwise (approximately 6 to 7 mm) and make sure that the matching mark on the cover is aligned with the groove on the top of the head screw driverHollowMarkSlitSpecific Product PrecautionsCautionSelectionCautionMounti ngBe sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 387 to 391 for Precautions on every ) Avoid use in locations with strong pressure pulsation or ) Contact SMC if the product is to be used in an application with a high frequency of ) Do not subject the gauge to shocks, such as dropping during transportation and mounting, as this can cause loss of indication ) Do not use this gauge in a location with high temperature and humidity, as this may cause faulty ) When mounting the pressure gauge, be certain to use a wrench on the square wrench flats to screw it into place.

7 If the wrench is applied on any other part, air leakage or other damage may Regulator SRH SeriesDimensionsModelMaterialFor SRH3000 For SRH4000B21-1-T11350112-T1 Rolled sheet steel (Electroless nickel plated) 371036618863 ARJAR425to 935 ARXAMRARMARPIR -AIRIRVVEXSRHSRPSRFITVICITVXITVHPVQVY1 VBAVBATAP100 SRHEPDM Seals1X210 With Relief Port Fittings (Applicable tube : 4)2X211 Regulator with a fitting in order to connect it to the relief port. Regulator with seals made of a different sealsStandard model model other than below are the same as the standard to OrderX211 With relief port fittings (Applicable tube : 4)NilStandardModelSRH3 0-X210 SRH4 0-X210 SRH3 1-X210 SRH4 1-X210 Relief mechanismPort sizeFluidProof pressureMax.

8 Operating pressureSetpressureAmbient and fluid temperaturesFluid-contact material (metal)DiaphragmmaterialWeightGrade AGrade BLow pressure typeHigh pressure typeGrade AGrade BNon-reliefClean air, N2, Ar, CO2, Pure waterAir, N2, Ar, CO2, WaterReliefClean air, N2 Air, N2Rc 1/8, 1/4 URJF 1/4Rc 1/4, 3/8, 1/2 URJF 3/8Rc 1/8, 1/4Rc 1/4, 3/8, 1 to to MPa0 to 60 C (No freezing)Stainless steel 316 (Body is stainless steel 316L)PTFEEPDM360 g730 g360 g730 gModelSRH3 0-X211 SRH4 0-X211 SRH3 1-X211 SRH4 1-X211 Relief mechanismPort sizeFluidProof pressureMax. operating pressureSetpressureAmbient and fluid temperaturesFluid-contact material (metal)DiaphragmmaterialWeightGrade AGrade BLow pressure typeHigh pressure typeGrade AGrade BNon-reliefClean air, N2, Ar, CO2, Pure waterAir, N2, Ar, CO2, WaterReliefClean air, N2 Air, N2Rc 1/8, 1/4 URJF 1/4Rc 1/4, 3/8, 1/2 URJF 3/8Rc 1/8, 1/4Rc 1/4, 3/8, 1 to to MPa0 to 60 C (No freezing)Stainless steel 316 (Body is stainless steel 316L)PTFEF luororubber360 g730 g360 g730 gSpecificationsSpecificationsOUTEXH tube : 4 Fitting.

9 KQH04-M5-X17 INOUTSRH SeriesMade to Order Specifications 1 Please contact SMC for detailed dimensions, specifications and lead Operation Product with Reduced Torque4X233 Fluoro grease is applied to an adjusting screw in order to make the knob operation easy. X233 SRHS tandard model no. Oil is not used for the wetted Operation Productwith Reduced TorqueAluminum Body5X234 The body material has been changed to model BodyMachined Relief Port M5 Thread3X216 Regulator with an M5 thread machined on the relief port in order to connect it to the relief port. X216 SRHS tandard model other than below are the same as the standard to OrderX216 Machined relief port M5 threadNilStandardModelSRH3 0-X216 SRH4 0-X216 SRH3 1-X216 SRH4 1-X216 Relief mechanismPort sizeFluidProof pressureMax.

10 Operating pressureSetpressureAmbient and fluid temperaturesFluid-contact material (metal)DiaphragmmaterialWeightGrade AGrade BLow pressure typeHigh pressure typeGrade AGrade BNon-reliefClean air, N2, Ar, CO2, Pure waterAir, N2, Ar, CO2, WaterReliefClean air, N2 Air, N2Rc 1/8, 1/4 URJF 1/4Rc 1/4, 3/8, 1/2 URJF 3/8Rc 1/8, 1/4Rc 1/4, 3/8, 1 to to MPa0 to 60 C (No freezing)Stainless steel 316 (Body is stainless steel 316L)PTFEF luororubber360 g730 g360 g730 gModelSRH3 0-X233 SRH4 0-X233 SRH3 1-X233 SRH4 1-X233 Relief mechanismPort sizeFluidProof pressureMax. operating pressureSetpressureAmbient and fluid temperaturesFluid-contact material (metal)DiaphragmmaterialWeightGrade AGrade BLow pressure typeHigh pressure typeGrade AGrade BNon-reliefClean air, N2, Ar, CO2, Pure waterAir, N2, Ar, CO2, WaterReliefClean air, N2 Air, N2Rc 1/8, 1/4 URJF 1/4Rc 1/4, 3/8, 1/2 URJF 3/8Rc 1/8, 1/4Rc 1/4, 3/8, 1 to to MPa0 to 60 C (No freezing)Stainless steel 316 (Body is stainless steel 316L)PTFEF luororubber360 g730 g360 g730 gModelSRH3 0-X234 SRH4 0-X234 SRH3 1-X234 SRH4 1-X234 Relief mechanismPort sizeFluidProof pressureMax.