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MEMS技術の課題と展望 - Panasonic
る[1]．以下ではmems技術実用化の経緯，および集積 化memsの例について述べた後，memsの実用化を支援 するオープンコラボレーションを紹介する． 第1図に，memsの例として静電浮上回転ジャイロを 示す[2]．外径1.5 mmのシリコン製のリング状ロータが
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