Transcription of SEM-EDX,EPMA の原理と特徴
1 SEM-EDX,EPMA ( ) X 2R R ( 2R ) 2R ( 2R ) 100000[cps] ( R) EPMA X SEM-EDX( ) EPMA( ) X X K L SEM-EDX EPMA X 1 X X X X 10000[cps] X X 100[cps] X 2 2 X Si ( ) ( ) ( ) X ( )
2 20 X X 100000[cps] X X 100000[cps] ( ) ( mm ) 100ppm ( ) ( ) SEM-EDX( ) EPMA( ) Hf M Hf M Zr L Zr L Y L 1,2 Y L 1 Zr L 1,2 Zr L 1 Zr L 2,3,4,6 Zr L 1 Zr L 2,3 Zr sL 2 EDX EPMA [ ]
