SEMICONDUCTOR FABRICATION FACILITIES - …

1 2014 oregon FIRE CODE245 chapter 27 SEMICONDUCTOR FABRICATION FACILITIESSECTION Scope. SEMICONDUCTOR FABRICATION FACILITIES and com-parable research and development areas classified as GroupH-5 shall comply with this chapter and the InternationalBuilding Code. The use, storage and handling of hazardousmaterials in Group H-5 shall comply with this chapter , otherapplicable provisions of this code and the InternationalBuilding Application. The requirements set forth in this chap-ter are requirements specific only to Group H-5 and shall beapplied as exceptions or additions to applicable requirementsset forth elsewhere in this Multiple hazards. Where a material poses multiplehazards, all hazards shall be addressed in accordance withSection Existing buildings and existing FABRICATION buildings and existing FABRICATION areas shall com-ply with this chapter , except that transportation and handlingof HPM in corridors and enclosures for stairways and rampsshall be allowed when in compliance with Section the International Building Permits.

2 Permits shall be required as set forth in Sec-tion Definitions. The following terms are defined in Chap-ter 2:CONTINUOUS GAS DETECTION CONTROL PRODUCTION MATERIAL (HPM).HPM FLAMMABLE FABRICATION 2703 GENERAL SAFETY Emergency control station. An emergency controlstation shall be provided in accordance with through Location. The emergency control station shallbe located on the premises at an approved location outsidethe FABRICATION Staffing. Trained personnel shall continuouslystaff the emergency control Signals. The emergency control station shallreceive signals from emergency equipment and alarm anddetection systems. Such emergency equipment and alarmand detection systems shall include, but not be limited to,the following where such equipment or systems arerequired to be provided either in this chapter or elsewherein this sprinkler system alarm and Manual fire alarm Emergency alarm Continuous gas detection Smoke detection Emergency power Automatic detection and alarm systems for pyro-phoric liquids and Class 3 water-reactive liquidsrequired by Section Exhaust ventilation flow alarm devices for pyro-phoric liquids and Class 3 water-reactive liquidscabinet exhaust ventilation systems required by Sec-tion Systems, equipment and processes.

3 Systems, equip-ment and processes shall be in accordance with through Application. Systems, equipment and processesshall include, but not be limited to, containers, cylinders,tanks, piping, tubing, valves and General requirements. In addition to therequirements in Section , systems, equipment andprocesses shall also comply with Section , otherapplicable provisions of this code, the International Build-ing Code and the International Mechanical Additional requirements for HPM supply pip-ing. In addition to the requirements in Section ,HPM supply piping and tubing for HPM gases and liquidsshall comply with this General requirements. The requirementsset forth in Section shall apply to supplypiping and tubing for HPM gases and Health-hazard ranking 3 or 4 HPM.

4 Sup-ply piping and tubing for HPM gases and liquids hav-ing a health-hazard ranking of 3 or 4 shall be weldedthroughout, except for connections located within aventilation enclosure if the material is a gas, or Page 245 Wednesday, January 15, 2014 12:32 PMSEMICONDUCTOR FABRICATION FACILITIES2462014 oregon FIRE CODE approved method of drainage or containment providedfor connections if the material is a Construction requirements. Construction of semi-conductor FABRICATION FACILITIES shall be in accordance withSections through FABRICATION areas. Construction and location offabrication areas shall comply with the InternationalBuilding Pass-throughs in exit access corridors. Pass-throughs in exit access corridors shall be constructed inaccordance with the International Building Liquid storage rooms.

5 Liquid storage roomsshall comply with chapter 57 and the International Build-ing HPM rooms. HPM rooms shall comply with theInternational Building Gas cabinets. Gas cabinets shall comply withSection Exhausted enclosures. Exhausted enclosuresshall comply with Section Gas rooms. Gas rooms shall comply with Sec-tion Service corridors. Service corridors shall com-ply with Section and the International Cabinets containing pyrophoric liquids orwater-reactive Class 3 liquids. Cabinets in fabricationareas containing pyrophoric liquids or Class 3 water-reac-tive liquids in containers or in amounts greater than 1/2 gal-lon (2 L) shall comply with Section Emergency plan. An emergency plan shall be estab-lished as set forth in Section Maintenance of equipment, machinery and pro-cesses.

6 Maintenance of equipment, machinery and processesshall comply with Section Security of areas. Areas shall be secured in accor-dance with Section Electrical wiring and equipment. Electrical wiringand equipment in HPM FACILITIES shall comply with through FABRICATION areas. Electrical wiring and equip-ment in FABRICATION areas shall comply with NFPA Workstations. Electrical equipment and deviceswithin 5 feet (1524 mm) of workstations in which flamma-ble or pyrophoric gases or flammable liquids are used shallcomply with NFPA 70 for Class I, Division 2 hazardouslocations. Workstations shall not be energized withoutadequate exhaust ventilation in accordance with : Class I, Division 2 hazardous electricalequipment is not required when the air removal fromthe workstation or dilution will prevent the accumula-tion of flammable vapors and fumes on a Hazardous production material (HPM)rooms, gas rooms and liquid storage rooms.

7 Electricalwiring and equipment in HPM rooms, gas rooms and liq-uid storage rooms shall comply with NFPA Corridors and enclosures for stairways and materials shall not be used or stored in corridorsor enclosures for stairways and Service corridors. Hazardous materials shall not beused in an open-system use condition in service Automatic sprinkler system. An approved auto-matic sprinkler system shall be provided in accordance withSections through and chapter Workstations and tools. The design of thesprinkler system in the area shall take into considerationthe spray pattern and the effect on the Combustible workstations. A sprinklerhead shall be installed within each branch exhaust con-nection or individual plenums of workstations of com-bustible construction.

8 The sprinkler head in the exhaustconnection or plenum shall be located not more than 2feet (610 mm) from the point of the duct connection orthe connection to the plenum. When necessary to pre-vent corrosion, the sprinkler head and connecting pip-ing in the duct shall be coated with approved or listedcorrosion-resistant materials. The sprinkler head shallbe accessible for periodic alternative automatic fire-extin-guishing systems are allowed. Activation ofsuch systems shall deactivate the related pro-cessing Process equipment which operates at tempera-tures exceeding 932 F (500 C) and is pro-vided with automatic shutdown capabilitiesfor hazardous Exhaust ducts 10 inches (254 mm) or less indiameter from flammable gas storage cabinetsthat are part of a Ducts listed or approved for use without inter-nal automatic sprinkler Combustible tools.

9 Where the horizontalsurface of a combustible tool is obstructed from ceilingsprinkler discharge, automatic sprinkler protection thatcovers the horizontal surface of the tool shall be :1. An automatic gaseous fire-extinguishing localsurface application system shall be allowed asan alternative to sprinklers. Gaseous-extin-guishing systems shall be actuated by infraredNote: HPM FACILITIES are also regulated by the State of oregon ,Building Codes Division, oregon Administrative Rules Chapter918, Division Page 246 Wednesday, January 15, 2014 12:32 PMSEMICONDUCTOR FABRICATION FACILITIES2014 oregon FIRE CODE247(IR) or ultraviolet/infrared (UV/IR) Tools constructed of materials that are listedas Class 1 or Class 2 in accordance with UL2360 or approved for use without internal fire-extinguishing system protection.

10 Gas cabinets and exhausted enclosures. Anapproved automatic sprinkler system shall be provided ingas cabinets and exhausted enclosures containing HPMcompressed : Gas cabinets located in an HPM room otherthan those cabinets containing pyrophoric Pass-throughs in existing exit access corri-dors. Pass-throughs in existing exit access corridors shallbe protected by an approved automatic sprinkler Exhaust ducts for HPM. An approved auto-matic sprinkler system shall be provided in exhaust ductsconveying gases, vapors, fumes, mists or dusts generatedfrom HPM in accordance with this section and the Interna-tional Mechanical Metallic and noncombustible nonmetal-lic exhaust ducts. An approved automatic sprinklersystem shall be provided in metallic and noncombusti-ble nonmetallic exhaust ducts when all of the followingconditions apply:1.