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Microelectromechanical Systems (MEMS) Actuators - RIT

MEMs Actuators ROCHESTER INSTITUTE OF TEHNOLOGY. MICROELECTRONIC ENGINEERING. Microelectromechanical Systems (MEMS). Actuators Dr. Lynn Fuller and Dr. Ivan Puchades Webpage: Microelectronic Engineering Rochester Institute of Technology 82 Lomb Memorial Drive Rochester, NY 14623-5604. Tel (585) 475-2035. Email: MicroE Dept Webpage: Rochester Institute of Technology October 31, 2016 Microelectronic Engineering October 31, 2016 Dr. Lynn Fuller Page 1. MEMs Actuators INTRODUCTION. Actuators Thermal Two beam heated cantilever Polyimide on Heaters Bimetalic heaters on diaphragms Electrostatic Capacitor Plate Drive Comb Drive Other Electromagnetic Peizoelectric Rochester Institute of Technology Microelectronic Engineering October 31, 2016 Dr.

© October 31, 2016 Dr. Lynn Fuller Rochester Institute of Technology Microelectronic Engineering MEMs –Actuators Page 3 OUTLINE Polycrystalline Silicon Thermal ...

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