CMOS Manufacturing Process
Digital Integrated Circuits Manufacturing Process EE141 A Modern CMOS Process p-well n-well p+ p-epi SiO 2 AlCu poly n+ SiO 2 p+ gate-oxide Tungsten TiSi 2 ... Transistor Layout 1 2 5 3 T r a n s i s t o r. Digital Integrated Circuits Manufacturing Process EE141 Vias and Contacts 1 2 1 Via Metal to Metal to Poly Contact Active Contact 1 2 5 4 3 ...
Process, Manufacturing, Circuit, Transistor, Manufacturing process, Circuits manufacturing process, T r a n s i s t o r
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