MEMS Fabrication I : Process Flows and Bulk …
1 U. Srinivasan © EE C245 Dr. Thara Srinivasan Lecture 2 MEMS Fabrication I : Process Flows and Bulk Micromachining Picture credit: Alien Technology
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6Microfluidics Theory handouts - University of …
www-bsac.eecs.berkeley.edu1 EE C245 Picture credit: Sandia National Lab Fluidic Dynamics Dr. Thara Srinivasan Lecture 17 Picture credit: A. Stroock et al., Microfluidic mixing on a chip
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MEMS Fabrication I : Process Flows and Bulk Micromachining
www-bsac.eecs.berkeley.edu• Remove using solvents (acetone) or O 2 plasma ... • Silicon Dioxide, Silicon Nitride • Metals • Polymers Wolf and Tauber Silicon crystal structure λ= 5.43 Å ...
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