Wafer Level micro-Encapsulation - MEMtronics RF …
Wafer Level micro-Encapsulation David I. Forehand and Charles L. Goldsmith MEMtronics Corporation Plano, Texas, USA 75075 dforehand@memtronics.com
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RF MEMS-Based Tunable Filters - MEMtronics
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www.memtronics.comRF MEMs Variable Capacitors for Filters 363 Figure 1. Cross-section of an RF MEMs capacitor in the unactuated a and actuated b positions. . . tric surface, forming a low impedance RF path to
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