Search results with tag "Sputter"
反応性スパッタリング法による Cr–N 作製とその特性
www.jim.or.jp503 Fig. 1 Schematic diagram of reactive DC magnetron sputter-ing apparatus. Fig. 2 Typical spectra of chromium and nitrogen in sputter-ing. (sputtering power＝300 W, argon partial pressure＝0.020
Ion Beam Sputtering: Practical Applications to Electron ...
www.southbaytech.com2 EM Sample Preparation Applications Laboratory Report 91 Figure 1: The Model IBS/e Ion Beam Sputter Deposition and Etching System.The inside of the vacuum chamber is shown at right with the Large Area Stage (LAS) installed.
Magnetron Sputtering Technology - DirectVacuum
www.directvacuum.comTo sputter conducting targets, a DC power supply is generally used. For insulating or semiconducting targets, an RF power supply is required with an automatic
Sputter Coating Technical Brief - IIT Kanpur
www.iitk.ac.inIntroduction TB-SPUTTER 1 Introduction When a target is bombarded with fast heavy particles, erosion of the target material occurs. The process, when occurring in the conditions of a gaseous glow discharge between an anode and