Transcription of Chapter 10 化學氣相沉積與介電質薄膜 - isu.edu.tw
1 Chapter 10.. 1.. 2. CVD vs.. SiO2. SiO2. Si Si Si . 3. CVD vs.. CVD.. 4.. - (PMD). - (IMD). (STI).. (PD). (ARC). 5. CMOS . PD2.. Metal 2, Al Cu Al Cu PD1. ARC. W USG. IMD . ILD2. 1, Al Cu PMD . W WCVD. ILD1 BPSG. STI n+ n+ USG p+ p+ STI. P N . P TiN. P CVD. 6.. STI N . : = 1 +1 + 1 + (N 1) + 1 = N + 3. STI PMD IMD PD.. 7. (CVD). (Chemical Vapor Deposition).. 8. CVD .. Si ( ) SiH4 ( ). SiCl2H2 ( DCS). Si ( ) SiCl3H ( TCS). SiCl4 ( Siltet). LPCVD SiH4, O2. SiO2 ( ) PECVD SiH4, N2O. PECVD Si(OC2H5)4 ( TEOS), O2. LPCVD TEOS. APCVD&SACVDTM TEOS, O3 (ozone). Oxynitride SiH4, N2O, N2, NH3. PECVD SiH4, N2, NH3. Si3N4 LPCVD SiH4, N2, NH3. LPCVD C8H22N2Si (BTBAS). W ( ) WF6 ( ), SiH4, H2. WSi2 WF6 ( ), SiH4, H2. TiN Ti[N (CH3) 2]4 (TDMAT). Ti TiCl4. Cu 9. CVD .. 10. CVD .. 11.. 12.. 13. CVD . APCVD . LPCVD . PECVD . 14. (APCVD). CVD . APCVD . APCVD (O3-TEOS).
2 STI PMD .. 15. APCVD . N2 N2.. 16. (LPCVD). ~ 1 Torr .. ( 650 C). (IMD) . 17.. 18. (PECVD). 1 ~ 10 Torr . (IMD) .. 19. (PECVD). RF .. 20. (Step Coverage).. CVD . (Aspect ratio).. (Conformality). (Overhang). 21.. CVD c a h b d w = b/a = d/a = b/c = (c - b)/b = h/w 22.. 23.. 180 270 . B A. 90 . C. 24.. A: 270 , C: 90 . A .. 25.. 26.. 27.. APCVD LPCVD.. 28. , .. PSG.. 29.. : . / / ( ). CVD. ( ). O3- CVD CVD. CVD( ). 30.. PMD: (zero tolerance).. IMD: . k( ).. 31. PMD .. W CVD .. 32.. W CVD .. 33. / / . USG.. Al Cu USG. Al Cu . USG. Al Cu 34.. 35.. 36.. 37. CVD .. l . 38.. (physisorption). (chemisorption). 39.. 2 eV. IMD PD . PECVD (10 to 20 eV) .. 40.. eV.. 400 C .. 41.. 42. CVD . (SiH4).. (tetra-ethyl-oxy-silane, TEOS ,Si(OC2H5)4). 43. CVD : . CVD. PECVD . PMD . (DARC). CVD . LPCVD . CVD. W CVD . WSix . 44. CVD : . ( ), , .. 45.. H. H. H. H Si H. Si H H.
3 H. 46. CVD : .. , SiH3, SiH2, SiH, . , .. 47. CVD : (TEOS). (tetra-ethyl-oxy-silane, TEOS. ,Si(OC2H5)4).. TEOS .. 48. H. TEOS H C H. H C H. H H O H H. H C C O Si O C C H. H H O H H. H C H. H C H. H. 49. TEOS . , , PMD IMD. CVD TEOS .. 50. TEOS . 100 100. 30 30. ( ). 10 10. 3 3. 1 1. 10 20 30 40 50 60 70 80 90 100 110. ( C). 51. TEOS . 168 C. (H2O) 100 C.. , , . 52.. MFC . TEOS.. 53.. MFC MFM.. TEOS.. 54.. MFC.. LFC . TEOS .. , TEOS . TEOS . 55.. 100% .. 56.. SiH4 3x10-4 3x10-5. SiH3 SiH2 SiH TEOS 10-3. WF6 10-4. 57. TEOS . TEOS.. 58.. = A exp (-Ea/kT). Ea .. 59.. ln = -Ea/k . 1/T. 60.. = [B] [C] [] .. 61.. = D dn/dx [B] [C] [] .. 62.. 63. CVD .. ( ) .. 64.
