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Lecture on Microelectromechanical Systems (MEMS ...

Apr 24, 2013 · 9. John Pelesko and David Bernstein, Modeling MEMS and NEMS, Chapman & Hall/CRC, 2003 10. Gabriel Rebeiz, RF MEMS: Theory, Design, and Technology, Wiley, 2003 11. Nam-Trung Nguyen and Steve Wereley, Fundamentals and Applications of Microfluidics, Artech House, 2002 12.

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  Applications, System, Mems, Mens, Microelectromechanical, Microelectromechanical systems, Mems and nems

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