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Ion Beam Sputtering: Practical Applications to Electron ...

Ion Beam Sputtering: Practical Applications to Electron ...

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2 EM Sample Preparation Applications Laboratory Report 91 Figure 1: The Model IBS/e Ion Beam Sputter Deposition and Etching System.The inside of the vacuum chamber is shown at right with the Large Area Stage (LAS) installed.

  Applications, Practical, Beam, Electron, Sputtering, Ion beam sputtering, Practical applications to electron

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