9 - 6 章 光合分波デバイス

1 9 6 2 2019 1/(26) 9 - 6 2 2- 1 2- 2 2- 3 2- 4 2- 5 2- 6 2- 7 ROADM 9 6 2 2019 2/(26) 9 6 2 2-1 [2012 3 ] 2-1-1 (1) Al2O3 HfO2 MgF2 Nb2O5 Si SiO2 Ta2O5 TiO2 Y2O3 ZrO2 (MgF2) (Si) (2) 1 1 2 m 100 1 1 (3) 1 2 BPF SPF LPF (4) 95 % 1 99 % ( nS )n5 ( n0= 1 ) n4n3n2n1d5d4d3d2d1n : d.

2 9 6 2 2019 3/(26) 1 2 (5) 1), 2) 2-1-2 1),2) 92 % 99 % 1 3 2 H L nd = 0 4 1 nH dH = nL dL = 0/4 1 3 1 4 2p + 1 | (HL)2p H | 0 R0 % p 2 R 900 nm R0 R ( ) 0 0 ( ) 0 ( , ) 0 (a) (BPF)(b) (c) (SPF)(d) (LPF) ( nS )H ( nH) ( n0= 1 )dLdHnH = , nL = nS = , 0 = m, p = 3L ( nL )HLH | (HL) p H | HL9 6 2 2019 4/(26) ()()()() + = = + = 11sin2,12.

3 12022202200 LHLHRSHpLHSHpLHnnnnaaannnnnnnnnnR (1 1) 2p + 1 R0 nH/nL R 2p | (HL)2p | R0 ()()220200 + =SpHLSpHLnnnnnnnnR (1 2) 1 4 1 3 1 4 2-1-3 1),2) BPF BPF 1 5 BPF 23 0 ( m) (%)p=4 R123050100nH = nC = , nL = nS = , 0 = 1550 nm, R0 = , m = 3 nC, dC | (HL)3 6H (LH)3 | 0/4 0/2 0/4 9 6 2 2019 5/(26) 1 nm 100 nm 1 nm BPF 2 BPF 1 5 2 Fabry-Perot BPF 1 6 BPF 1 6 1550 nm BPF 96 % nm 0 BPF T ()()100001111.

4 2 + = =LHTCCnnmRmRmdn (1 3) nCdC m R0 m R0 Ra, Rb baRRR=0 1 6 1 5 0/4 BPF 3) (1 3) BPF nCdC dnC/dT Si 1) , , 1 , 3 , 7 , 2006. 2) , , 2 , 5 , 8 , 2002. 3) , , O plus E, , , , Aug. 2008. 0 ( m) (%)Fabry-Perot (1 ) (2 ) T154515550501009 6 2 2019 6/(26) 9 6 2 2-2 [2011 11 ] 2-2-1 Diffraction Grating Diffractive Grating 2 1 2 2 Spectroscopy Diffractive Optics Diffractive Optical Element 1),2)

5 2-2-2 2 1 2 2 2 1 2 2 d h n i t p s n i m m (m ) dhp s 0 0 m (m ) mnini m i m (m ) i n i m m (m ) dhp s 0 0 m (m ) mnini m i m (m ) idt n m p s i 0 m mnini i m (m ) m (m ) 0 m idt n m p s i 0 m mnini i m (m ) m (m ) 0 m i9 6 2 2019 7/(26) 1 (sin sin )= ( = 0, 1, 2, 3 ) (2 1) m m 0 m (2 1) n ni = 1 sin sin = ( = 0, 1, 2, 3 ) (2 2) 2-2-3 R C WA Rigorous Coupled-Wave Analysis 3)

6 FDTD Finite-Difference Time-Domain method 4) (1) 1 % 5) % 1 Echelette Blazed Grating 2 3 p i = 1 2 3 1 n m nm n sin nm ni sin i = m / d m = 0, 1, 2, 3 .. hp 0 1 d hp 0 1 d 9 6 2 2019 8/(26) 100 % 100 % % s p (2) < / d < 2 0 1 s p 1 1 1 (2 2) n m = i (m = 1) sin = 2 (2 3) s n = /d = h % h/d = 98 % h/d = 90 % h/d = 6)

7 N 100 % 7) 6) n = /d = h/d = 45 n = /d = 45 1 70 nm 380 nm d = m = m /d = s p 1 % % 175 8) (3) / d > 2 9) 2 10),11) 1 12) 9 6 2 2019 9/(26) s p 1000 1 2-2-4 1 1) 22 , 11 , , , 1997.

8 2) , , , , , 2003. 3) Moharam, et al. Stable implementation of the rigorous coupled-eave analysis for surface-relief gratings: enhanced transmittance matrix approach, J. Opt. Soc. Am. A, , , , 1995. 4) , , , , , 1998. 5) , , , , 1978. 6) K. Yokomori Dielectric surface-relief gratings with high diffraction efficiency, Appl. Opt., , , , 1984. 7) H. Kogelnik Coupled wave theory for thick hologram gratings, Bell Syst. Tech. J., , , 1969. 8) , , , , , 2004. 9) , , , , , , 2005. 10) Y. Kanamori et al. Broadband anti-reflection gratings fabricated upon silicon substrates, Opt.

9 Lett., , , 1999. 11) H. Toyota et al. Fabrication of microcone array for antireflection structured surface using metal dotted pattern, Jpn. J. Appl. Phys., , , 2001. 12) M. Born and E. Wolf Principles of Optics: 5th edition, Pergamon Press, , 1974. 9 6 2 2019 10 /(26 ) 9 6 2 2-3 [2012 3 ] AW G Arrayed-Waveguide Grating / 1988 1) 1990 2) 90 2000 DWDM 3) Si InP / 4) 2-3-1 3 1 AW G AW G AW G AW G AW G L 3 1 AW G AW G d f x nc, ns 9 6 2 2019 11/(26) sincsn L ndm += (3 1) 5) m 1