Pumping Operations With DCU

1 Pumping Operations with DCUPM 0547 BE/P (0410)- Turbomolecular Pumps -Betriebsanleitung operating To These .. General .. Parameter Overview, Numeric DCU .. Overview, Operations Orientated .. Operations .. General .. Switching On The DCU .. 6 Self-Testing .. Short Overview, operating .. Switching On The Pumping Station .. 7 Operations with mains voltages 90 - 132V .. Switching Stand-By ON And OFF .. Switching The Casing Heating ON And OFF .. Sealing Gas Valve Operations .. Operations with The Temperature Management System (TMS).

2 Gas Type Dependent Operations .. Switching The Turbopump ON And Setting Rotation Speed Switch Rotation Speed Setting Mode .. Pressure Measurement .. Backing Pump Operations .. Switching Off The Pumping Station .. Remote Control .. 11 operating Modes with The Remote Control .. 11 Standard Remote Control .. 11 Remote Control Priority .. 11 Remote Control malfunction acknowledgement" .. Venting The Operations Via Serial Interface RS 485 .. Emergency Power Operations .. Brake Mode (only with TC 600) .. Configuration Of The Accessories Input And Output (only TC 100).

3 Configuration of The Analog Output (only TC 100).. Codes .. General .. Errors During Self-Testing .. Errors During Operations with The TC 600 .. Warnings .. Information .. 15 Index PagePageCaution!Danger of damage to the unit or !Danger of an electric !Danger of personal DefinitionsUsed AbbreviationsDCUO peration and Display UnitTCElectronic Drive UnitTCKE lectronic Drive Unit (Print Modul)Please noteCurrent operating instructions are also available via infoservice".Please Note!Attention to particularly important informationon the product, handling the product, or to aparticular part of the documentation.

4 PLEASE NOTE31. Introduction To These instructions The Display Control Unit DCU is a universal operating unit forthe control and monitoring of PFEIFFER vacuum operating instructions describe the Operations inrespect of PFEIFFER VACUUM turbomolecular pumps. Thismanual is a component of the complete operating manual foryour modular turbopump system. Depending on the configura-tion of your system, other operating instructions are includedin your delivery consignment (please see the table).PPrroodduuccttDDeeffiinniittiioon nOOppeerraattiinngg MMaannuuaall NNuummbbeerrTurbomolecular Drag PumpDefinition of the turbopumpdependent on the type of pump* Pumping Operations with the DCU, turbopumpsOperating definitions /parametersPM 800 547 BEDCU 001, 100-600 Description of the control unit/installationPM 800 477 BETPS 100, 200, 300, 600 Description of the power packPM 800 521 BECasing heating, turbopumpDescription of the casing heatingPM 800 542 BEAir cooling, turbopumpDescription of the air cooling systemPM 800 543 BEWater cooling.

5 TurbopumpDescription of the water cooling systemPM 800 546 BEBacking Pump relay boxDescription of the backing pump controlPM 800 544 BETemperature Management System TMSD escription of the TMS installation PT 0099 BEPfeiffer protocol RS 232/RS 485 Description of the serial interface protocolPM 800 488 BELevel Converter RS 232/RS 485 Description of the Pumping control via the RS 232PM 800 549 BETVF 005 Description of the venting valvePM 800 507 BETIC 250 Description of the ProfibusPM 800 599 BEPWM-BoxDescription of the pulse width modulationPM 800 563 BETCS 010 Description of the Pumping Station Control UnitPT 0045 BECover IP 54 for TC 600 Description of the water protection coverPT 0024 BETBC 600 Description of the brake unitPT 0018 BE* The number is available from PFEIFFER VACUUM Service or from the internet address shown in this make every effort to ensure that you are in possession ofall the necessary product information but should anything bemissing please get in touch with your local PFEIFFERVACUUM representatives or telephone the hotline numberwhich you will find on the back cover of these respective documents are also available

6 In PDF fileformat via the homepage following operating instructions are available for the TCpump program:2. Parameter GeneralAll function relevant elements of the display control unit orpump are available in the DCU in the form of parameter has a parameter number and a clear textdesignation, for example [[PP::002266]] OpMode TMP . The value of the parameter is always readable and in someinstances can be altered. In principle there are three differenttypes of parameter:PPaarraammeetteerr TTyypp FFuunnccttiioonnSetting command Activating/deactivating a parameterStatus requestParameter status reques (readable only)Set value standardAltering a parameterTo adapt these parameters to the individual requirements ofthe user, the DCU provides two different parameter setswhich are distinguished by the number of parametersinvolved.

7 The respective parameter set is selected via [[PP::779944]] Param. set . The parametering is always SSeettCCoommmmeennttSSeettttiinngg [[PP::779944]] sseett Basic parameter setOnly parameters sorted according0to number and parameter typeExtended parameter setComplete parameter set, sorted1according to number and parameter typeParameters which do not appear in the display can neverthe-less be operated via the serial Commands (readable and writable)#DisplayName, Descriptionminmaxfact. setting RS 4851)001 Heating Pre-selection, 002 Standby Standby ON/OFFOFFONOFFR/W0 004 RUTime ctr Run-up time monitoring, ON/OFFOFFONONR/W0 009 Error acknError acknowledgement W0 010 Pump stat Pumping station ON/OFFOFFONON(*)R/W0 012 Vent enab Venting enable ON/OFFOFFONON(*)R/W0 013 Brake enab Pre selection brake ON/OFFOFFONOFFR/W0 -023 Motor TMP Motor Turbopump ON/OFFOFFONON(*)R/W0 -024 Conf.

8 Out1 Configuration output K1; 0=switchpoint attained; 1= TMS regulator; 2=var. -025 OpMode BkP Operations mode backing pump, 0=non-stop; 1=intermittent; 2=switch on delayed020R/W7 026 OpMode TMP Operations mode TMP 0=final rot. speed op.; 1=rot. speed setting (*)R/W7 027 Gas mode Gas mode 0=heavy inert gases; 1=other gases010R/W7 028 Opmode rem Remote Operations mode 0=standard, 1=Remote priority, 2 Remote error 029 OpMode Drv Drive unit Operations mode OFF=max., ON=reduced power intakeOFFONOFFR/W0 030 Vent mode Venting mode 0=controlled venting ; 1=no venting; 2=venting On 020R/W7 032 Conf Out4 Configuration heating output; 0=Heat/TMS Operations ; 1=sealing gas valve control010R/W7 -035 Conf I/O1 Configuration accessories ON/Output 1 (see chapter )030R/W7- 036 Conf I/O2 Configuration accessories ON/Output 2 (see chapter )031R/W7- 055 Conf AO1 Configuration Analog Output 1 0=Rot Speed; 1=Power; 2=Current020R/W7 Status request (only readable)#DisplayName, Descriptionminmaxfact.

9 Setting RS 485300 Unit remote controlled, not choosable by R0 301 Oil deficOil deficiency turbopump R0 -302 Rotation switch point attained R0 303 Error codeActual error code no Err , Errxxx or Wrnxxx R4 304 Over temperature Electronic drive unit R0 305 Over temperature turbopump R0 306 Set rotation speed attained R0 307 Turbopump accelerates R0 308 Set rotspdSet rotation speed TMP in Hz02000 R1 309 Act rotspdActual rotation speed TMP in Hz02000 R1 310 TMP I-MotMotor current TMP in R2 311 TMP Op hrs operating hours TMP in h099999 R1 312 Drv SoftwSoftware version electronic drive unit R4 313 TMP DClinkMotor voltage TMP in R2 314 Drv Op hrs operating hours electronic drive unit099999 R1 315 TMP finspdFinal

10 Rotation speed TMP in Hz02000 R1 316 TMP powerMotor power TMP in W01000 R1 319 Cycl count Cycle counter099999 R1 331 TMS ActTmpHeating TMS, actual value in C5200 R1 -333 TMS steadyTMS regulator engaged ON/OFFOFFON R0 -334 TMS maxTmp Maximum TMS temperature occured in C5200 R1 -335 Heat typeHeating type 0=conventional heating, 1=TMS01 R7 -340 PressureActual pressure value in mbar 3)1E-101E3 R3--349 Drv NameUnit type electronic drive unit R4 350 Ctr NameUnit type operating and display unit 3)-R4--351 Ctr SoftwSoftware version Display and Control Unit DCU 3) R4--360 Past Err1 Error storage, Position 1 (last error occuring) R4 361 Past Err2 Error storage, Position 2 R4 362 Past Err3 Error storage, Position 3 R4 363 Past Err4 Error storage, Position 4 R4 364 Past Err5 Error storage, Position 5 R4 365 Past Err6 Error storage, Position 6 R4 366 Past Err7 Error storage, Position 7 R4 367 Past Err8 Error storage, Position 8 R4 368 Past Err9 Error storage, Position 9 R4 369 Past Err10 Error storage, Position 10 R4 Set values (readable and writable)