CHAPTER 8: Diffusion
0 0 where S is the total amount of dopant per unit area. The solution of the diffusion equation satisfying the above conditions is: C x t S Dt x Dt ( , ) p 2 4 (Equation 8.8) This expression is the Gaussian distribution, and the dopant profile is displayed in Figure 8.4b. By substituting x = 0 into Equation 8.8: C t S s Dt ( ) (Equation 8.9)
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