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Device Fabrication Technology1

Device Fabrication Technology1

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flat-panel displays, micro-electro-mechanical systems (MEMS), and even DNA chips for DNA screening. The rest of this chapter provides an introduction to the modern device processing technology. Perhaps the most remarkable advances have occurred in the fields of lithography (Section 3.3) and interconnect technology (Section 3.8).

  Introduction, System, Micro, Mechanical, Electro, Mems, Micro electro mechanical systems

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