MOS Transistor - Chenming Hu

Modern MOSFET technology has advanced continually since its beginning in the 1950s. Figure 6–5 is a transmission electron microscope view of a part of a MOSFET. It shows the poly-Si gate and the single-crystalline Si body with visible individual Si atoms and a 1.2 nm amorphous SiO 2 film between them. 1.2 nm is the size of four SiO 2 molecules.

Advanced, Single, Transistor, Mos transistors

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